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Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment and spare parts. We deal in equipment and spare parts used in the fabrication and manufacturing of solar cells and semiconductors.
We specialize in plasma etch, clean, ash, strip equipment and ATE Equipment. New arrivals include: Drytek 384t, March PX-1000, M&W Dual Channel Chiller, ENI- OEM 650A, Plasmos SD-4000, a large supply of new Drytek/Lam Quad, 384T and ASIQ spare parts, and a large selection of Cell Phone Test Equipment. If we don't own it, we don't list it. We accept Mastercard, Visa, Paypal, and Discover Cards.
Manufacturer
|
Model
|
Condition
|
Price
|
|---|---|---|---|
|
Drytek New Spare Parts Various: Just arrived a truck ... |
NEW | $None |
|
Drytek / Lam Sensor PCB 2800310B: New motion sensor for ... |
New | $75.00 |
|
Athena XT 16 Temperature Controller 16JCB000: Athena XT 16 Temperature ... |
Used/Good | $75.00 |
|
Shindengen Electric 24 VDC Power Supply GY24010G: Shindengen Electric 24 VDC ... |
used | $100.00 |
|
Switching Systems International (SSI) 15 VDC / SQM-200 20-0028-152-7: Switching Systems International (SSI), ... |
Used | $150.00 |
|
Drytek/Lam Wafer Lift Pins 600749: Wafer lift pins, $150 ... |
New | $150.00 |
|
Matrix 403 Operation/Installation Manual 0995-998844: System One Etcher Installation/ ... |
Used | $150.00 |
|
Matrix 105 Installation/Operation Manual 0995-99848: System One Stripper Installation/Operation ... |
Used | $150.00 |
|
Edwards PV40PKS-Lam C41419000: Edwards PV40PKS- Lam Switch ... |
$150.00 | |
|
Tegal/Digital VT-520 Monitor VT-520: VT-520 monitor used with ... |
Used | $150.00 |
|
MKS Baratron / 100 Torr 12AA-0010088: MKS 122AA-0010088, 100 Torr, ... |
Used | $150.00 |
|
Drytek / Sony Monitor 384T 384t: Drytek 384T Monitor made ... |
Used | $150.00 |
|
ACDC Electronics 5 Volt DC Power Supply EC5N17-1: ACDC Electronic 5 volt ... |
used | $150.00 |
|
Drytek / Lam Bottom Baffle 100, 125, 150MM 601179: 601179, New Bottom Baffle ... |
New | $150.00 |
|
Drytek / Lam Teflon Stabilizer 2201435: 2201435 Rev. B Teflon ... |
new | $150.00 |
|
Drytek/Lam Upper Electrode Diffuser 715-250599-001: Upper Electrode Difusser for ... |
Cleaned | $175.00 |
|
Drytek/Lam Power Supply Jetlight 601852: NEW in the BOX!!! |
NEW | $175.00 |
|
Superior Electric Slo-Syn Stepping Motor M092-FD-302: Drytek PN 2201225 200 ... |
New in the Box | $175.00 |
|
Gasonics DC Driver PC Board 13014-02 Rev C: Gasonics L series DC ... |
unk | $200.00 |
|
Gasonics Display Driver, PCB 16498-01 Rev E: Gasonics L series Display ... |
unk | $200.00 |
|
Gasonics CPU-Process, PWA 14909-01: Gasonics L series, Looks ... |
unk | $200.00 |
|
ACEco Lam 490 6" Electrode ACEco DS33-341: 6" bottom electrode for ... |
New | $200.00 |
|
Drytek/Lam 101 P2 Adapter 2800902 Rev4: P2 101 Adapter PCB ... |
Used | $200.00 |
|
Drytek/Pittman DC Arm Motor 2004031: ASIQ DC Arm motor. ... |
Used | $200.00 |
|
Drytek/Superior Electric Stepper Motor / M092-FD-302 2201309: Drytek Quad stepper motor ... |
Used | $200.00 |
|
Drytek/Lam Keyboard Filter Assembly 2801111: Removed from Drytek ASIQ/Quad ... |
Used | $200.00 |
|
Tegal 903e Manuals MI-1215-00001 Rev F: Set of two Tegal ... |
Used | $200.00 |
|
Drytek/Lam Temp Sensor Cable MPS-6 2002023: Temp Sensor Cable Assy ... |
New | $200.00 |
|
Varian Angle Valve / NW40 A/O 1243-L6281-303: New Varian NW40 A/O ... |
New | $200.00 |
|
Drytek/Lam Magnetron PS Interface PCB 2801145: Lam Research/Drytek Magnetron PS ... |
used | $200.00 |
|
Superior Electric Translator Motor Drive SLO SYN 440-TH10: S/N 51786, SLO SYN ... |
used | $200.00 |
|
Pittman Stepper Motor 14204C223: 30.3 Volts, removed from ... |
used | $200.00 |
|
Drytek/Lam Upper Electrode GRD Grid 715-250899-001: Upper Electrode Ground Grid. ... |
Cleaned | $250.00 |
|
Flexco Microwave Braided L/C RF Cable 601279: 29" long Braided L/C ... |
used | $250.00 |
|
Drytek/Lam/Varitech Plasma Applicator Tubes / 384T 23001700 / 5009106144: Varitech VT PN 5009106144. ... |
New | $250.00 |
|
Drytek/Lam Video PCB VGME-1024: New VGME-1024 Vidio Card ... |
used | $250.00 |
|
Drytek/Lam End Point Amplifier 023914: Lam/Drytek End Point Amplifier ... |
Used | $250.00 |
|
IDEC Full Color Mark Sensor SAIK-FIN3: IDEC SAIK-FIN3 Full Color ... |
used | $250.00 |
|
Drytek/Lam RS 232 Interface PCB 2800878 Rev. 3: Lam ASIQ RS-232 Interface ... |
used | $275.00 |
|
Drytek/Lam Wafer Lift Pin Kit 600749: Kit includes three lift ... |
New | $275.00 |
|
Motorola MVME 712M / P2 Adapter MVME 712M: Motorola MVME 712M with ... |
used | $275.00 |
|
Gasonics Teflon Ring 14382-01: Teflon Ring for Gasonics ... |
Good | $300.00 |
|
Drytek/Lam Plasma Arrestor / 384T 600756: Three 384T Plasma Arrestors. ... |
New | $300.00 |
|
Drytek/Lam HI Temp Feedthru VSG-81 2101384: VSG81 Hi Temp Feedthru ... |
new | $300.00 |
|
Lam PCB 810-017388-003 Rev-1: |
Used | $300.00 |
|
Drytek/Lam Triode IO PCB 2800899 Rev 5: Part came out of ... |
Used | $300.00 |
|
VAT ISO Valve F12-71673-02: ISO NW 100. Valve ... |
Used | $300.00 |
|
Drytek/Lam Gas Interface PCB 2800893 Rev 4: ASIQ Gas Interface PCB. |
Appears Unused | $300.00 |
|
Drytek/Lam Ball Screw Assembly 715-250594-001: New part that is ... |
New | $300.00 |
|
Gasonics Gasonics L-3510 Manuals OM98-3510 Rev. A: Complete set of Gasonics ... |
Good | $300.00 |
|
Drytek/Lam DC/Stepper Control PCB 2800917 REV 6: Removed from ASIQ tool. ... |
unknown | $300.00 |
|
Drytek/Lam I/O PCB A ASSY 384T 2800014: 384T I/O Board A ... |
NEW | $300.00 |
|
Drytek/Lam Focus Ring, ESC 384T 716-080600-001: Ring, Focus, SPCL, 150 ... |
New | $300.00 |
|
Drytek/Lam 125MM Quartz Insulator Ring 026085: New in the box ... |
NEW | $300.00 |
|
VAT F12 / Gate Valve F12: S/N F12-88030/002, File # ... |
used | $300.00 |
|
Galil Motion Galil DMC-100-10 STD Bus Board 2800841: Removed from working tool. ... |
Used | $349.00 |
|
Jennings Vacuum Capacitor CMV1-1000-0303: 8-1000 pf 3KV, Jennings ... |
Used / Good | $350.00 |
|
Drytek/Lam Ceramic Wafer Clamp 2301856: 150 MM Ceramic Wafer ... |
Cleaned | $375.00 |
|
Motorola MVME-101 Stepper PCB 2800473: |
Used | $400.00 |
|
Drytek/Lam RF Interface PCB 2800921: ASIQ RF Interface PCB |
New/used | $400.00 |
|
Drytek/Lam Transport I/O PCB 2800911 Rev 7: ASIQ Transport I/O PCB. |
Appears Unused | $400.00 |
|
Drytek/Robitech PCB / 8 Valve Module 980-4825 S/N 31525: We also have several ... |
New | $400.00 |
|
Drytek/Robitech 4 Valve Module PCB 3000120: Robitech P/N 980-4525 |
new | $400.00 |
|
Lam Water Level Monitor 853-034162-001-1: Water Level Monitor used ... |
New | $400.00 |
|
XYCOM AOUT XVME-530 70530-001: Used Xycom AOUT XVME 530 ... |
used | $400.00 |
|
Drytek/Lam ASIQ Software / Rev 4.81 5540481: ASIQ software Revision 4.81, ... |
Used | $400.00 |
|
Drytek/Lam Focus Ring / 384T 716-080177-001: New in the Box!! ... |
NEW | $400.00 |
|
Drytek/Lam PLT Bottom, ESC, ASIQ/384T 715-080490-001: Chamber bottom plate, ESC, ... |
New in the Box | $400.00 |
|
XYCOM DIO XVME-240 70240-001: Xycom DIO XVME-240. Removed ... |
used | $400.00 |
|
Drytek/Lam Dual Overcurrent Monitor PCB 2800385: Dual Rf overcurrent Monitor ... |
NEW | $430.00 |
|
Lam End Point Detector 852-494005-001-B-3614: Lam optical end point ... |
Used | $500.00 |
|
Lam PCB 810-370141-001 Rev B: |
Used | $500.00 |
|
Drytek/Lam/PMT ASIQ Gas Box 2004270R-6: Lam ASIQ Gas box. ... |
Used/Unknow | $500.00 |
|
Lam ESC Power Supply 853-250758-001-1-221: ESC power supply removed ... |
Used/Unknow | $500.00 |
|
Drytek/Lam PCB / MVME-121 MVME-121: Removed from a Drytek/Lam ... |
Used | $500.00 |
|
Drytek/Lam CPU/SER/GRAPH INTF ASSY 384T 2800600: 384T CPU/SER/GRAPH INTF ASSY |
NEW | $500.00 |
|
Drytek/Lam Quad Keyboard 3000111: New in the box ... |
New | $500.00 |
|
Lam Electrode, AL, Anodized 715-011531-014: Shower head electrode. Anodized |
New | $500.00 |
|
drytek/lam Transfer Cover / Clear Lexan 2201267: P/N 2201267 Rev D, ... |
new | $500.00 |
|
MKS Throttle Control Valve / 253A 253A-4-3-2: ISO-100 (4" id) We ... |
operational used | $500.00 |
|
Motorola MVME 147S-1 147S-1: Removed from Drytek 384T. ... |
Used | $500.00 |
|
Lam PCB ADIO 810-017031-04 rev A: We have several Lam ... |
Used | $550.00 |
|
Motorola Motorola MVME 147S-1 147S-1: Removed from a Drytek/Lam ... |
Used | $600.00 |
|
Motorola VME CPU Board MVME-147-001: NEW in the BOX!!! ... |
NEW | $600.00 |
|
Switching Systems International DC Power Supply / SQV402-1022-2 20-0017-02502: New in the box!! ... |
NEW | $600.00 |
|
Lam Chamber Feed Manifold 839-007964-001: 6 Gas Chamber Feed ... |
new | $600.00 |
|
Nucom Stepper Driver Card / DRD002A 2800294: NUCOM Stepper Driver Card ... |
NEW | $600.00 |
|
Motorola/Drytek MVME 121 CPU PCB 2800299: Motorola MVME 121 Rev ... |
New | $600.00 |
|
Motorola MVME 101 SECS CPU MVME 101: NEW in the Box, ... |
NEW | $600.00 |
|
Galil Motion Galil Motion DMC-300-10 PCB 600974: New in the box. ... |
New | $600.00 |
|
Drytek / SSI DC Power Supply / SSI 853-08597-001: Switching Systems Model SQV402-1022-2. ... |
New | $600.00 |
|
Lam Exit Arm 125mm Assy 853-001154-004: 125 MM Exit arm ... |
New | $600.00 |
|
Green Spring VMEbus IP Carrier Board VIPC610: VIPC610 GreenSpring VMEbus Carrier ... |
NEW | $600.00 |
|
Lam Autoetch Monitor 853-000358-001: Lam AutoEtch Monitor, Removed ... |
unk | $600.00 |
|
MKS Pressure Controller / 152E 152E-PO: S/N 36255-1-1c. Includes interconnect ... |
operational used | $650.00 |
|
Drytek/Lam Insulator, ESC 716-249268-003: Insulator Ring, ESC, 9500, ... |
NEW | $700.00 |
|
Drytek/Lam Dual Power Control Module 2600446: Used on Drytek RF ... |
NEW | $700.00 |
|
Drytek/Lam OSC Buffer Module 2600346: OSC buffer module for ... |
new | $700.00 |
|
Drytek Lam Stepper / DC Module 384t: Drytek/Lam Stepper/DC Module complete. ... |
Used | $750.00 |
|
Robitech Robitech 4 Valve Module 4 Valve: Complete Robitech 4 valve ... |
used | $750.00 |
|
Drytek/Lam Magnatron Power Supply 853-080248-001 rev E-1: Used on Lam/Drytek ASIQ ... |
used | $800.00 |
|
Lam DC Power Supply Assy 853-370057-001-A-220: SOLD 11/10/09 Removed Lam ... |
Used | $800.00 |
|
Drytek Quad Reciprocating Bellows 2100424: Drytek Quad Recip Bellows ... |
NEW | $800.00 |
|
Drytek/Lam Microstep Translator PCB 2800293: NUCOM Microstep Translator MID014-1002 ... |
NEW | $800.00 |
|
Drytek/Lam Wafer Arm ASSY 150 MM 853-080447-002: ASIQ or 384T Wafer ... |
NEW | $900.00 |
|
Drytek/Lam Lower Electrode Assembly 602058: New Brake mofified lower ... |
new | $900.00 |
|
Drytek/Lam ASIQ Matching Network 60194-1: Two in stock, plus ... |
used | $980.00 |
|
Lam Alliance A-4 Assembly 853-491592-001-A-3117: Removed from Lam Alliance ... |
Used | $1,000.00 |
|
Drytek/Lam 2 KW Driver Module 2600347: |
NEW | $1,000.00 |
|
Drytek/Lam Controller PCB 605-016005-001: Part came out of ... |
Used | $1,200.00 |
|
Drytek/Lam Transport Motor Chassis 2800918 rev 6: Complete Tensport Motor Chassis ... |
Used | $1,200.00 |
|
NUCON / Drytek Nucon Microstep Translator 2800293: New in the box ... |
New | $1,200.00 |
|
Lam 9500 Matching Network (upper) 853-250124-003/853-250118-001: Upper match box controller ... |
Used | $1,500.00 |
|
Drytek/Lam Cassette Drive Bellows Assy 2201143-PR: NEW in the Box. ... |
new | $1,500.00 |
|
Drytek/Lam Expansion PCB 605-06006-001: |
Used | $1,500.00 |
|
Lam 9500 Matching Network (lower) 853-480133-001/853-440656-001: Complete Lam Alliance 9500 ... |
Used | $1,500.00 |
|
Drytek/Robitech Robitech Pneumatic Assy 990-9080: Robitech Pneumatic Assy used ... |
Used | $1,500.00 |
|
Drytek/Lam ASIQ Gas Box 6 MFC's: 6 MFC's complete ASIQ ... |
Used | $1,500.00 |
|
Drytek/Lam 8" 350' Opto Wafer ARM ASSY 2201675: NEW in the BOX! ... |
NEW | $1,500.00 |
|
Drytek/Lam Heater Control Chassis ASIQ Heater Control Chassis: Complete Heater Control Chassis removed ... |
Used | $1,500.00 |
|
Drytek/Lam Process Chamber/Slot Valve Kit 2100938: Anodized Process Chamber Slot ... |
New in the Box | $1,500.00 |
|
Drytek/Lam 150 MM Electrode, ESC, 384T 2301913: 150 MM ESC Electrode, ... |
New in the Box | $1,500.00 |
|
Drytek/Lam Cassette Drive Bellows Assy 2201143-PR: Drytek/Lam Cassette Drive Bellows ... |
New | $1,500.00 |
|
Galil / Drytek Galil DMC 1414 Motion Controller 2201527: Galil DMC 1414 Motion ... |
new | $1,500.00 |
|
Tegal 901e/903e Software 26-041-022: Software for Tegal 901e/903e. ... |
good | $1,750.00 |
|
Drytek/Lam Bottom Chamber Ceramic 2100988: Bottom Chamber Ceramic HT ... |
New | $2,000.00 |
|
Drytek/Lam Power Distribution Box ASIQ PDB: Complete ASIQ Power Distribution ... |
Used | $2,000.00 |
|
Drytek/Lam Al Etch Chamber ASIQ 150MM: Complete Al Metal Etch ... |
used | $2,000.00 |
|
VAT 8" Gate Valve / PM-5 64246-XE52-1108: Valve was removed form ... |
Used/Opens/ Closes | $2,150.00 |
|
Drytek/Lam Fluidics Coax Feedthru Assy 2200983: New in the box ... |
NEW | $2,500.00 |
|
Drytek RF Power Supply 1000 Watt 2000500: Operational Drytek 1000 Watt ... |
operational | $2,750.00 |
|
Drytek/Lam J type Upper Electrode 2301728: J-Type Upper Electrode Assy, ... |
NEW | $3,000.00 |
|
Drytek Bellows Lower Electrode 839-250568-001: This one is sold, ... |
new | $3,000.00 |
|
Lam Remote CRT 852-017750-001E: Lam Remote CRT for ... |
Used | $3,000.00 |
|
Drytek/Lam ASSY ESC 200MM 384T 853-080615-003: In the Box. New ... |
NEW | $3,500.00 |
|
Drytek/Lam 384T 6" Chamber Assy 853-080202-150: New in the Box. ... |
NEW | $3,500.00 |
|
Drytek/Lam Lower Electrode Assy 602169-2: New in the Box! ... |
NEW | $3,500.00 |
|
Drytek/Lam Microwave Lower Assy 2301838: Complete Microwave Lower electrode ... |
NEW | $3,500.00 |
|
Drytek/Lam ASIQ Matching Network 601941-3: NEW in the Box. ... |
NEW | $4,500.00 |
|
Drytek/Lam Matching Network 384T 600768: S/n 434032. Matching network. ... |
Rebuilt by Lam | $6,000.00 |
|
Drytek/Lam ASIQ parts misc: We have 2 Lam ASIQ ... |
$15,000.00 |