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Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.
We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam ASIQ Metal Etcher/Asher cluster tool, and Lam 9500 Alliance chambers.
Manufacturer
|
Model
|
Condition
|
Price
|
|---|---|---|---|
|
Lam/Drytek Wafer Arm ASSY 853-080447-002: ASIQ or 384T Wafer ... |
Never used | $400.00 |
|
Lam/Drytek Upper Electrode GRD Grid 715-250899-001: Upper Electrode Ground Grid. ... |
Cleaned | $250.00 |
|
Lam/Drytek Upper Electrode Diffuser 715-250599-001: Upper Electrode Difusser for ... |
Cleaned | $175.00 |
|
Lam/Drytek Triode IO PCB 2800899 Rev 5: Part came out of ... |
Used | $500.00 |
|
Lam/Drytek Transport I/O PCB 2800911 Rev 7: ASIQ Transport I/O PCB. |
Appears Unused | $400.00 |
|
Tegal Tegal Rf Generator CR 1087-20101: Tegal internal RF Generator. ... |
unknown | $400.00 |
|
Gasonics Teflon Ring 14382-01: Teflon Ring for Gasonics ... |
Good | $300.00 |
|
Lam/Drytek RF Interface PCB 2800921: ASIQ RF Interface PCB |
New/used | $400.00 |
|
Lam PCB ADIO 810-017031-04 rev A: We have several Lam ... |
Used | $550.00 |
|
Lam PCB 810-370141-001 Rev B: |
Used | $500.00 |
|
Lam PCB 810-017388-003 Rev-1: |
Used | $300.00 |
|
Lam/Drytek MVME-101 Stepper PCB 2800473: |
Used | $400.00 |
|
MKS MKS-653B 653B-4-100-1: We have a MKS ... |
Used | $200.00 |
|
Lam Microwave Power Supply 853-080248-001 rev E-1: 1 new and 2 ... |
New/used | $1,275.00 |
|
Lam Lam/ASIQ parts misc: We have 2 Lam ASIQ ... |
$15,000.00 | |
|
ACEco Lam 490 6" Electrode ACEco DS33-341: 6" bottom electrode for ... |
New | $200.00 |
|
VAT ISO Valve F12-71673-02: ISO NW 100. Valve ... |
Used | $300.00 |
|
Lam/Drytek Gas Interface PCB 2800893 Rev 4: ASIQ Gas Interface PCB. |
Appears Unused | $300.00 |
|
Millipore FC-280-S FC-280S: N2, operating pressure 10-40 ... |
Rebuilt/Calibrated | $400.00 |
|
Lam/Drytek Expansion PCB 605-06006-001: |
Used | $1,500.00 |
|
Lam ESC Power Supply 853-250758-001-1-221: ESC power supply removed ... |
Used/Unknow | $500.00 |
|
Lam End Point Detector 852-494005-001-B-3614: Lam optical end point ... |
Used | $500.00 |
|
Gasonics Display Driver, PCB 16498-01 Rev E: Gasonics L series Display ... |
unk | $200.00 |
|
Gasonics DC Driver PC Board 13014-02 Rev C: Gasonics L series DC ... |
unk | $200.00 |
|
Gasonics CPU-Process, PWA 14909-01: Gasonics L series, Looks ... |
unk | $200.00 |
|
Lam/Drytek Controller PCB 605-016005-001: Part came out of ... |
Used | $1,200.00 |
|
Lam/Drytek Ceramic Wafer Clamp 2301856: 150 MM Ceramic Wafer ... |
Cleaned | $175.00 |
|
MKS Baratron 120A-13991: 1 Torr, 1/2" VCR, ... |
used | $149.00 |
|
MKS Baratron 625A11TDE: 10 TORR, Lam part ... |
Used | $200.00 |
|
Lam ASIQ Matching Network 60194-1: We several in stock. ... |
used | $900.00 |
|
Lam/Drytek/PMT ASIQ Gas Box 2004270R-6: Lam ASIQ Gas box. ... |
Used/Unknow | $500.00 |
|
Lam 9500 Matching Network (upper) 853-250124-003/853-250118-001: Upper match box controller ... |
Used | $900.00 |
|
Lam 9500 Matching Network (lower) 853-480133-001/853-440656-001: Complete Lam Alliance 9500 ... |
Used | $1,500.00 |
|
Tegal 901e/903e Software 26-041-022: Software for Tegal 901e/903e. ... |
good | $1,750.00 |
|
VAT 8" Gate Valve 64246-XE52-1108: Valve was removed form ... |
Used/Unknow | $950.00 |
|
Lam 5" Electrode 715-11673-005: 5" Lower electrode for ... |
New | $300.00 |