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Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.
We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam ASIQ Metal Etcher/Asher cluster tool, and Lam 9500 Alliance chambers.
Manufacturer
|
Model
|
Condition
|
Price
|
|---|---|---|---|
|
Lam 5" Electrode 715-11673-005: 5" Lower electrode for ... |
New | $300.00 |
|
VAT 8" Gate Valve 64246-XE52-1108: Valve was removed form ... |
Used/Unknow | $950.00 |
|
Tegal 901e/903e Software 26-041-022: Software for Tegal 901e/903e. ... |
good | $1,750.00 |
|
Lam 9500 Matching Network (lower) 853-480133-001/853-440656-001: Complete Lam Alliance 9500 ... |
Used | $1,500.00 |
|
Lam 9500 Matching Network (upper) 853-250124-003/853-250118-001: Upper match box controller ... |
Used | $900.00 |
|
Lam/Drytek/PMT ASIQ Gas Box 2004270R-6: Lam ASIQ Gas box. ... |
Used/Unknow | $500.00 |
|
Lam ASIQ Matching Network 60194-1: We several in stock. ... |
used | $900.00 |
|
MKS Baratron 120A-13991: 1 Torr, 1/2" VCR, ... |
used | $149.00 |
|
MKS Baratron 625A11TDE: 10 TORR, Lam part ... |
Used | $200.00 |
|
Lam/Drytek Ceramic Wafer Clamp 2301856: 150 MM Ceramic Wafer ... |
Cleaned | $175.00 |
|
Lam/Drytek Controller PCB 605-016005-001: Part came out of ... |
Used | $1,200.00 |
|
Gasonics CPU-Process, PWA 14909-01: Gasonics L series, Looks ... |
unk | $200.00 |
|
Gasonics DC Driver PC Board 13014-02 Rev C: Gasonics L series DC ... |
unk | $200.00 |
|
Gasonics Display Driver, PCB 16498-01 Rev E: Gasonics L series Display ... |
unk | $200.00 |
|
Lam End Point Detector 852-494005-001-B-3614: Lam optical end point ... |
Used | $500.00 |
|
Lam ESC Power Supply 853-250758-001-1-221: ESC power supply removed ... |
Used/Unknow | $500.00 |
|
Lam/Drytek Expansion PCB 605-06006-001: |
Used | $1,500.00 |
|
Millipore FC-280-S FC-280S: N2, operating pressure 10-40 ... |
Rebuilt/Calibrated | $400.00 |
|
Lam/Drytek Gas Interface PCB 2800893 Rev 4: ASIQ Gas Interface PCB. |
Appears Unused | $300.00 |
|
VAT ISO Valve F12-71673-02: ISO NW 100. Valve ... |
Used | $300.00 |
|
ACEco Lam 490 6" Electrode ACEco DS33-341: 6" bottom electrode for ... |
New | $200.00 |
|
Lam Lam/ASIQ parts misc: We have 2 Lam ASIQ ... |
$15,000.00 | |
|
Lam Microwave Power Supply 853-080248-001 rev E-1: 1 new and 2 ... |
New/used | $1,275.00 |
|
MKS MKS-653B 653B-4-100-1: We have a MKS ... |
Used | $200.00 |
|
Lam/Drytek MVME-101 Stepper PCB 2800473: |
Used | $400.00 |
|
Lam PCB 810-370141-001 Rev B: |
Used | $500.00 |
|
Lam PCB 810-017388-003 Rev-1: |
Used | $300.00 |
|
Lam PCB ADIO 810-017031-04 rev A: We have several Lam ... |
Used | $550.00 |
|
Lam/Drytek RF Interface PCB 2800921: ASIQ RF Interface PCB |
New/used | $400.00 |
|
Gasonics Teflon Ring 14382-01: Teflon Ring for Gasonics ... |
Good | $300.00 |
|
Tegal Tegal Rf Generator CR 1087-20101: Tegal internal RF Generator. ... |
unknown | $400.00 |
|
Lam/Drytek Transport I/O PCB 2800911 Rev 7: ASIQ Transport I/O PCB. |
Appears Unused | $400.00 |
|
Lam/Drytek Triode IO PCB 2800899 Rev 5: Part came out of ... |
Used | $500.00 |
|
Lam/Drytek Upper Electrode Diffuser 715-250599-001: Upper Electrode Difusser for ... |
Cleaned | $175.00 |
|
Lam/Drytek Upper Electrode GRD Grid 715-250899-001: Upper Electrode Ground Grid. ... |
Cleaned | $250.00 |
|
Lam/Drytek Wafer Arm ASSY 853-080447-002: ASIQ or 384T Wafer ... |
Never used | $400.00 |