Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.

We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam ASIQ Metal Etcher/Asher cluster tool, and Lam 9500 Alliance chambers. 

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Tegal Tegal Rf Generator

Price:
$400.00

Quantity:
2

Condition:
unknown

Part Number:
CR 1087-20101

Year:
1986

Description:
 Tegal internal RF Generator. Condition is unknown, being sold as is.