Drytek/Lam Microwave Lower Assy (back to listings)
Complete Microwave Lower electrode assy. New cost is $29000.
Includes ceramic and chuck. 21.5 mm dia.
Logan Technologies, L.P. is a buyer and seller of new and used surplus semiconductor fabrication equipment, electronic test equipment, RF generators, vacuum pumps, misc lab equipment, and spare parts. We deal in equipment and spare parts used in the fabrication, testing, and manufacturing of semiconductors. We only sell items that we own.