Semiconductor Parts

Model	Part Number	Condition	Price
ACDC Electronics 5 Volt DC Power Supply ACDC Electronic 5 volt power supply. 5V@17 amps. billyliles@aol.com	EC5N17-1	used	$150.00
ACEco Lam 490 6" Electrode 6" bottom electrode for Lam 490. New in the box.	ACEco DS33-341	New	$200.00
Branson/IPC EOP/Pressure Control Branson/IPC EOP/Pressure Control PCB. PWA 15451-01 Rev JRemoved from end-users store room.billyliles@aol.com	PWA-15451-01 REV J	NEW	$400.00
Drytek Quad Reciprocating Bellows Drytek Quad Recip Bellows $800 each. New in the Box! billyliles@aol.com 254-773-4070	2100424	NEW	$800.00
Drytek RF Power Supply 1000 Watt Operational Drytek 1000 Watt 13.56 Mhz RF supply. S/N 1071.It powers up ...	2000500	operational	$1,750.00
Drytek Bellows Lower Electrode Lower Electrode Bellows for Drytek, ASIQ, 384T, Quad tool..billyliles@aol.com	839-250568-001	new	$900.00
Drytek / Lam Bottom Baffle 100, 125, 150MM 601179, New Bottom Baffle for Drytek 100, 125, 150 MM tools.	601179	New	$150.00
Drytek / Lam Teflon Stabilizer 2201435 Rev. B Teflon Stablizer for Drytek tools. billyliles@aol.com	2201435	new	$150.00
Drytek / Lam Sensor PCB New motion sensor for Drytek tools. P/N 2800310B billyliles@aol.com	2800310B	New	$75.00
Drytek / Nucon Microstep Translator PCB NUCOM Microstep Translator MID014-1002 P/N 2800293billyliles@aol.com	2800293	NEW	$800.00
Drytek / Sony Monitor 384T Drytek 384T Monitor made by Sony. It tpowers up, but I'm unable ...	384t	Used	$150.00
Drytek / SSI DC Power Supply / SSI Switching Systems Model SQV402-1022-2. Used in Drytek 384T computer drawer. billyliles@aol.com	853-08597-001	New	$600.00
Drytek Lam Stepper / DC Module Drytek/Lam Stepper/DC Module complete. Untested sold "as is". Used Drytek Model 384T ...	384t	Used	$750.00
Drytek/Lam Triode Oxide BTTM Electrode Drytek Oxide 150 MM Bottom Electrode. NEWbillyliles@aol.com	2300753-PR	New	$900.00
Drytek/Lam Upper Electrode GRD Grid Upper Electrode Ground Grid. 150 MM.9.1MM.	715-250899-001	Cleaned	$250.00
Drytek/Lam Upper Electrode Diffuser Upper Electrode Difusser for 150 MM ASIQ or 384T.	715-250599-001	Cleaned	$175.00
Drytek/Lam Lower Electrode 200MM 038 Step New in the box!! Lower electrode 200 MM 038 stepbillyliles@aol.com	601743	NEW	$1,200.00
Drytek/Lam Wafer Arm ASSY 150 MM ASIQ or 384T Wafer Arm ASSY, 150 MM.Also listed as Drytek P/N ...	853-080447-002	NEW	$1,000.00
Drytek/Lam Ceramic Wafer Clamp 150 MM Ceramic Wafer Clamp. Cleaned by Varitech International. Used in ASIQ's ...	2301856	Cleaned	$375.00
Drytek/Lam Plasma Arrestor / 384T Three 384T Plasma Arrestors. All new. $300 each.	600756	New	$300.00
Drytek/Lam Video PCB New VGME-1024 Vidio Card for Lam/Drytek ASIQ or Quad tool. billyliles@aol.com	VGME-1024	used	$250.00
Drytek/Lam ASIQ parts We have 2 Lam ASIQ tools that we plan to sell for $15k each. ...	misc		$15,000.00
Drytek/Lam HI Temp Feedthru VSG-81 VSG81 Hi Temp Feedthru Fluidic	2101384	new	$300.00
Drytek/Lam End Point Amplifier Lam/Drytek End Point Amplifier Assembly. Removed from Lam/Drytek ASIQ. We have several ...	023914	Used	$250.00
Drytek/Lam Cassette Drive Bellows Assy NEW in the Box. Cassette Drive Bellows Assy for Drytek. billyliles@aol.com 254-773-4070	2201143-PR	new	$1,500.00
Drytek/Lam RS 232 Interface PCB Lam ASIQ RS-232 Interface PCB. Assembly # 2800880. Used. Sold "as is". ...	2800878 Rev. 3	used	$275.00
Drytek/Lam 101 P2 Adapter P2 101 Adapter PCB used on Drytek/Lam VME computers. billyliles@aol.com	2800902 Rev4	Used	$200.00
Drytek/Lam Triode IO PCB Part came out of an end users store room.	2800899 Rev 5	Used	$300.00
Drytek/Lam Expansion PCB	605-06006-001	Used	$1,500.00
Drytek/Lam Controller PCB Part came out of an end users store room.	605-016005-001	Used	$1,200.00
Drytek/Lam RF Interface PCB ASIQ RF Interface PCB	2800921	New/used	$400.00
Drytek/Lam Transport I/O PCB ASIQ Transport I/O PCB.	2800911 Rev 7	Appears Unused	$400.00
Drytek/Lam Gas Interface PCB ASIQ Gas Interface PCB.	2800893 Rev 4	Appears Unused	$300.00
Drytek/Lam Quad Dual Overcurrent Assy Drytek Dual RF Supply Overcurrent Monitor Assembly, New in the Box.billyliles@aol.com	2600452	New	$900.00
Drytek/Lam Wafer Lift Pin Kit Includes 3 lift pins # 602120 and Pin removal tool # 600947	600749	New	$250.00
Drytek/Lam PCB / MVME-121 Removed from a Drytek/Lam ASIQ computer.	MVME-121	Used	$500.00
Drytek/Lam Ball Screw Assembly New part that is used on Drytek/Lam ASIQ/Quad.billyliles@aol.com	715-250594-001	New	$600.00
Drytek/Lam Keyboard Filter Assembly Removed from Drytek ASIQ/Quad tool. Includes P/N 2801110 PCB and 2800475 PCB.	2801111	Used	$200.00
Drytek/Lam 384T Ver 3.80 Software New Version 3.80 W/PROM for Drytek 384T, P/N 5540380billyliles@aol.com	5540380	New	$1,000.00
Drytek/Lam Temp Sensor Cable MPS-6 Temp Sensor Cable Assy MPS-6.	2002023	New	$200.00
Drytek/Lam STAT QTZ BTTM Triode ASSY Drytek Static Quartz Bottom Triode Assembly 2301205billyliles@aol.com	2301205	New	$3,000.00
Drytek/Lam Bottom Chamber Ceramic Bottom Chamber Ceramic HT System. New cost is $7000. Our cost $2000. ...	2100988	New	$2,000.00
Drytek/Lam Power Supply Jetlight NEW in the BOX!!!	601852	NEW	$175.00
Drytek/Lam Matching Network 384T S/n 434032. Matching network. Rebuilt by Lam and it's in the box ...	600768	Rebuilt by Lam	$6,000.00
Drytek/Lam 8" 350' Opto Wafer ARM ASSY NEW in the BOX! 8" 350' Opto Wafer Arm ASSY.	2201675	NEW	$1,500.00
Drytek/Lam DC/Stepper Control PCB Removed from ASIQ tool. Untested.AS IS ASSY # 2800918 Questions? contact billyliles@aol.com ...	2800917 REV 6	unknown	$300.00
Drytek/Lam Electrode, ESC, 150MM Drytek 150 MM Lower Electrode ESCbillyliles@aol.com	839-080570-001	New	$500.00
Drytek/Lam HSG UV Light Drytek HSG UV Lightbillyliles@aol.com	601800	NEW	$200.00
Drytek/Lam I/O PCB A ASSY 384T 384T I/O Board A ASSY   billyliles@aol.com	2800014	NEW	$300.00
Drytek/Lam CPU/SER/GRAPH INTF ASSY 384T 384T CPU/SER/GRAPH INTF ASSY	2800600	NEW	$500.00
Drytek/Lam ASIQ Software / Rev 4.81 ASIQ software Revision 4.81, 3-disc.	5540481	Used	$400.00
Drytek/Lam Power Distribution Box Complete ASIQ Power Distribution Box. Removed from a working Tool.	ASIQ PDB	Used	$2,000.00
Drytek/Lam Heater Control Chassis Complete Heater Control Chassis removed from a working ASIQ tool.	ASIQ Heater Control Chassis	Used	$1,500.00
Drytek/Lam ASIQ Matching Network NEW in the Box. ASIQ RF Matching network. We also have -1's, ...	601941-3	NEW	$4,500.00
Drytek/Lam ASSY ESC 200MM 384T In the Box. New 200 MM ESC 384T assembly. We also have ...	853-080615-003	NEW	$5,000.00
Drytek/Lam J type Upper Electrode J-Type Upper  Electrode Assy, Manual, Quad, 384T, ASIQ, NEW in the Box.billyliles@aol.com	2301728	NEW	$5,000.00
Drytek/Lam 384T 6" Chamber Assy New in the Box. ASSY, 6", Chamber 150 mm 384T, ESCbillyliles@aol.com	853-080202-150	NEW	$4,500.00
Drytek/Lam Lower Electrode Assy New in the Box! Lower Electrode ASM 150 Ballscrewbillyliles@aol.com	602169-2	NEW	$5,000.00
Drytek/Lam Microwave Lower Assy Complete Microwave Lower electrode assy. New cost is $29000.Includes ceramic and chuck.billyliles@aol.com	2301838	NEW	$5,000.00
Drytek/Lam Insulator, ESC Insulator Ring, ESC, 9500, ASIQ, 384T. New in the box.	716-249268-003	NEW	$700.00
Drytek/Lam Focus Ring / 384T New in the Box!! Ring, Focus, 150 MM, ESC, 384T billyliles@aol.com	716-080177-001	NEW	$400.00
Drytek/Lam Wafer Lift Pin Cartridge Lift Pins 602120	602120	New	$75.00
Drytek/Lam Quad Keyboard New in the box Drytek/Lam Keyboard Assy.	3000111	New	$500.00
Drytek/Lam New Spare Parts Just arrived a truck load of Drytek/Lam 384T, ASIQ, Quad spare parts.All ...	Various	NEW	Call
Drytek/Lam Process Chamber/Slot Valve Kit Anodized Process Chamber Slot Valve Kit for ASIQ/384Tbillyliles@aol.com	2100938	New in the Box	$1,500.00
Drytek/Lam PLT Bottom, ESC, ASIQ/384T Chamber bottom plate, ESC, 384T and ASIQ	715-080490-001	New in the Box	$400.00
Drytek/Lam 150 MM Electrode, ESC, 384T 150 MM ESC Electrode, 384TYGage, 384T	2301913	New in the Box	$1,500.00
Drytek/Lam Focus Ring, ESC 384T Ring, Focus, SPCL, 150 MM, ESC, 384Tbillyliles@aol.com	716-080600-001	New	$200.00
Drytek/Lam 2 KW Driver Module	2600347	NEW	$1,000.00
Drytek/Lam Dual Power Control Module Used on Drytek RF supply. Billyliles@aol.com	2600446	NEW	$700.00
Drytek/Lam Dual Overcurrent Monitor PCB Dual Rf overcurrent Monitor PCB NEW billyliles@aol.com	2800385	NEW	$430.00
Drytek/Lam 125MM Quartz Insulator Ring New in the box 125MM Quartz Insulator Ring. P/N 026085 billyliles@aol.com	026085	NEW	$300.00
Drytek/Lam Magnetron PS Interface PCB Lam Research/Drytek Magnetron PS Interface PCB. Remove ASIQ tool. Two in stock. ...	2801145	used	$200.00
Drytek/Lam Transport Motor Chassis Complete Tensport Motor Chassis for Drytek/Lam ASIQ tool. Includes part# 2800918 Rev ...	2800918 rev 6	Used	$2,000.00
Drytek/Lam OSC Buffer Module OSC buffer module for drytek rf supply. NEW billyliles@aol.com	2600346	new	$700.00
drytek/lam Transfer Cover / Clear Lexan P/N 2201267 Rev D, Clear Lexan Transfer chamber cover. 16 1/2" Diameter. ...	2201267	new	$500.00
DryTek/Lam Quad Shower Head Quad shower head. 2300654billyliles@aol.com	2300654	New	$1,200.00
Drytek/Lam Al Etch Chamber Complete Al Metal Etch chambers. Chambers were removed from a Drytek/Lam ASIQ ...	ASIQ 150MM	used	$2,000.00
Drytek/Lam Cassette Drive Bellows Assy Drytek/Lam Cassette Drive Bellows Assy, New in the Box! billyliles@aol.com	2201143-PR	New	$1,500.00
Drytek/Lam Lower Electrode Assembly New Brake mofified lower electrode assy. billyliles@aol.com	602058	new	$900.00
Drytek/Lam Upper Electrode 100-25-50 AL Drytek Upper Electrode 100-25-50 Aluminum 026182billyliles@aol.com	026182	NEW	$700.00
Drytek/Lam Dual Monitor Overcurrent ASSY Drytek Dual Monitor Overcurrent ASSY for Dual RF GeneratorP/N 2600452billyliles@aol.com	2600452	NEW	$800.00
Drytek/Lam 125 MM Insulator Ring NEW Drytek 125 MM Insulator Ring # 026085billyliles@aol.com	026085	NEW	$400.00
Drytek/Lam 125 MM Wafer Clamp Drytek 125MM HF 60 DEG Wafer Clamp # 2101362billyliles@aol.com	2101362	NEW	$400.00
Drytek/Lam Ground Grid Drytek 100-150 MM Metal Ground Grid, 11MM, # 2301817 NEWbillyliles@aol.com	2301817	New	$400.00
Drytek/Lam REF BTM Triode FIN Mach Oxide Drytek REF Bottom Triode FIN MACH OXIDEbillyliles@aol.com	2300753-PR	New	$900.00
Drytek/Lam 150 MM ESC Chuck Drytek Anodized 150 MM Bottom ESC Electrode Chuck. 2301913billyliles@aol.com	2301913	NEW	$1,800.00
Drytek/Lam Lower ESC Insulator Teflon Lower ESC electrode insulator for Drytek 150 MM ESC.billyliles@aol.com	ESC Insulator	NEW	$400.00
Drytek/Lam HSG Lower Electrode HSG Lower Electrode 384T. billyliles@aol.com	715-080084-001 Rev E-1	new	$1,500.00
Drytek/Lam Liner, HSG, ESC ASIQ/384T/Quad Liner, HSG, ESCbillyliles@aol.com	713-080492-001	new	$600.00
Drytek/Lam Lower Electrode Quad, 8" domed Quad lower electrode . 8" domedbillyliles@aol.com	715-018611-115	NEW	$1,400.00
Drytek/Lam/Varitech Plasma Applicator Tubes / 384T Varitech VT PN 5009106144. Drytek PN 2301700	23001700 / 5009106144	New	$250.00
Drytek/Pittman DC Arm Motor ASIQ DC Arm motor. Mod# DD-21ML1000-25. S/N 089402-002	2004031	Used	$200.00
Drytek/Robitech PCB / 8 Valve Module We also have several used ones in stock that were removed from ...	980-4825 S/N 31525	New	$400.00
Drytek/Robitech 4 Valve Module PCB Robitech P/N 980-4525	3000120	new	$400.00
Drytek/Robitech Robitech Pneumatic Assy Robitech Pneumatic Assy used with DRYTEK ASIQ tool. Includes: Pheumatic Interface PCB ...	990-9080	Used	$1,500.00
Drytek/Superior Electric Stepper Motor / M092-FD-302 Drytek Quad stepper motor assembly. 200oz. in., 200 steps per rev,1.65 v, ...	2201309	Used	$200.00
Eaton PCB ASSY / Micro-Step New Eaton Mirco-step PCB 0342-1649-006 rev H, Software rev 2.07billyliles@aol.com	0342-1649-006 Rev H	NEW	$400.00
Eaton PCB ASSY, Micro-Step New Eaton PCB ASSY, Micro-Step 0342-1649-004, REV H Software rev 2.05billyliles@aol.com	0342-1649-0004 Rev H	New	$400.00
Eaton PCB ASSY, Magnet PS Eaton Magnet Power Supply 0342-0254-3001billyliles@aol.com	0342-0254-3001	New	$600.00
Eaton Beam Current AMP Eaton Beam Current AMP P/N 5990-0097-0001Removed from end-users store room.billyliles@aol.com	5990-0097-0001	new	$600.00
Edwards PV40PKS-Lam Edwards PV40PKS- Lam Switch : 24 V .25A Max Pressure: 7 Bar ...	C41419000		$150.00
Flexco Microwave Braided L/C RF Cable 29" long Braided L/C RF Cable.  Manufactured by Flexco Microwave for Lam/Drytek ...	601279	used	$250.00
Galil / Drytek Galil DMC 1414 Motion Controller Galil DMC 1414 Motion Controller. Used in Drytek tools. Drytek P/N 2201527 ...	2201527	new	$1,500.00
Galil Motion Galil Motion DMC-300-10 PCB New in the box. Galil Motion DMC-300-10 Board Assembley Drytek P/N 600974 ...	600974	New	$600.00
Galil Motion Galil DMC-100-10 STD Bus Board Removed from working tool.  DMC 100-10 standard Bus Board Drytek P/N 2800841 ...	2800841	Used	$349.00
Galil Motion Motion Controller Galil Motion Model SSV-800 Rev E., Motion ControllerRemoved from working Drytek 384Tbillyliles@aol.com	SSV-800 REV E	used	$300.00
Gasonics Teflon Ring Teflon Ring for Gasonics model L-3200	14382-01	Good	$300.00
Gasonics DC Driver PC Board Gasonics L series DC Driver, Also have rev A, All look unused.	13014-02 Rev C	unk	$200.00
Gasonics CPU-Process, PWA Gasonics L series, Looks unused.	14909-01	unk	$200.00
Graphic Strategies VGME-1024 Graphic Strategies VGME-1024-4L Rev A. NEW, Used on Drytek / Lam tools.billyliles@aol.com	VGME-1024-4L Rev A	New	$1,000.00
Green Spring VMEbus IP Carrier Board VIPC610 GreenSpring VMEbus Carrier Board. Drytek P/N 2800842 billyliles@aol.com	VIPC610	Used	$300.00
IDEC Full Color Mark Sensor IDEC SAIK-FIN3 Full Color Mark Sensor NPN Open C 28 VDC max, ...	SAIK-FIN3	used	$250.00
Jennings Vacuum Capacitor 8-1000 pf 3KV, Jennings CMV1-1000-0303 Vacuum Capacitor billyliles@aol.com	CMV1-1000-0303	Used / Good	$350.00
Lam End Point Detector Lam optical end point detector. Part was taken off an Alliance oxide ...	852-494005-001-B-3614	Used	$500.00
Lam Alliance A-4 Assembly Removed from Lam Alliance A-4 chamber. Complete assembly # 853-491592-001-A-3117. Includes PCB ...	853-491592-001-A-3117	Used	$1,000.00
Lam 9500 Matching Network (upper) Upper match box controller and matching network. Parts were removed from Lam ...	853-250124-003/853-250118-001	Used	$1,500.00
Lam PCB ADIO We have several Lam ADIO boards.	810-017031-04 rev A	Used	$550.00
Lam PCB	810-370141-001 Rev B	Used	$500.00
Lam PCB	810-017388-003 Rev-1	Used	$300.00
Lam ESC Power Supply ESC power supply removed from Alliance A-4 9500 module. We have three ...	853-250758-001-1-221	Used/Unknow	$500.00
Lam 9500 Matching Network (lower) Complete Lam Alliance 9500 lower RF Matching network and controller. Parts were ...	853-480133-001/853-440656-001	Used	$1,500.00
Lam Water Level Monitor Water Level Monitor used on Lam and Drytek tools.	853-034162-001-1	New	$400.00
Lam Electrode, AL, Anodized Shower head electrode. Anodized	715-011531-014	New	$500.00
Lam Autoetch Monitor Lam AutoEtch Monitor, Removed from end-users store room. We're unable to check ...	853-000358-001	unk	$600.00
Lam Remote CRT Lam Remote CRT for Rainbow tool with Classic Softeware. Powers up and ...	852-017750-001E	Used	$3,000.00
Lam MINI MATCH Drytek/Lam MINI MATCH P/N 853-080085-001Removed from Drytek 384T Etcherbillyliles@aol.com	853-080085-001	used	$900.00
Lam Plate, Bottom, Octagonal, Liner Compact Octagonal Bottom Plate Liner Compactbillyliles@ao..com	715-330150-002	New	$1,500.00
Lam Serial I/O 392A Lam Research Serial I/O PCB 392A. Removed from end-users store room.billyliles@aol.com	392-1-B-569-186	New	$300.00
Matrix 403 Operation/Installation Manual System One Etcher Installation/ Operation Manual on clean room paper.	0995-998844	Used	$150.00
Matrix 105 Installation/Operation Manual System One Stripper Installation/Operation Manual on clean room paper.	0995-99848	Used	$150.00
Matrix Process Controller Matrix Process Controller, 1000-0027 Rev CRemoved from end users store room, but ...	1000-0027 Rev C	New	$1,500.00
Matrix Transport Interface Transport Interface 1010-0019 Rev B, Removed from end user store room, condition ...	1010-0019 Rev B	unk	$400.00
MKS Baratron / 100 Torr MKS 122AA-0010088, 100 Torr,  S/N 95090337A. Removed from an operational tool, but ...	12AA-0010088	Used	$150.00
MKS Pressure Controller / 152E S/N 36255-1-1c. Includes interconnect cables. Removed from Drytek 384T. Opens and closes ...	152E-PO	operational used	$650.00
Modgraph 9" Color Monitor for 384T New in the Box, Modgraph 9" color monitor for Drytek 384T. Works ...	MG 3930	New	$400.00
Motorola Motorola MVME 147S-1 Removed from a Drytek/Lam ASIQ computer. Contains Drytek software. billyliles@aol.com	147S-1	Used	$600.00
Motorola MVME-101 Stepper PCB	2800473	Used	$400.00
Motorola VME CPU Board NEW in the BOX!!! ASSembly # 01-W-3347F02A. S/N 4645367	MVME-147-001	NEW	$600.00
Motorola MVME 101 SECS CPU NEW in the Box, Motorola MVME 101 SECS CPU. We also have ...	MVME 101	NEW	$600.00
Motorola MVME 712M / P2 Adapter Motorola MVME 712M with P2 Adapter PCB billyliles@aol.com 254-773-4070	MVME 712M	used	$275.00
Motorola MVME 147S-1 Removed from Drytek 384T. Tow sets of RAMS, 5540420 and 5540300. billyliles@aol.com	147S-1	Used	$500.00
Motorola/Drytek MVME 121 CPU PCB Motorola MVME 121 Rev P.	2800299	New	$600.00
Nucom Stepper Driver Card / DRD002A NUCOM Stepper Driver Card DRD002A, Drytek # 2800294 billyliles@aol.com	2800294	NEW	$600.00
NUCON / Drytek Nucon Microstep Translator New in the box Nucon Mircostep Translator, MID014-1002 Used in Drytek tools. ...	2800293	New	$1,200.00
Pearson Current Monitor Pearson Current Monitor Model 410billyliles@aol.com	Model 410	used	$200.00
Pittman Stepper Motor 30.3 Volts, removed from Drytek etcher. $200 eachWe also have 2 new ones ...	14204C223	used	$200.00
Robitech Robitech 4 Valve Module Complete Robitech 4 valve module. Removed from a Drytek 384T. billyliles@aol.com	4 Valve	used	$750.00
Shindengen Electric 24 VDC Power Supply Shindengen Electric 24 VDC PS. Removed from a Lam/Drytek ASIQ350 Watts, 100 ...	GY24010G	used	$300.00
Superior Electric Slo-Syn Stepping Motor Drytek PN 2201225 200 oz. in. / 200 step per rev./1.65V/6.8A/DC HZ ...	M092-FD-302	New in the Box	$175.00
Superior Electric Translator Motor Drive S/N 51786, SLO SYN 440-TH10 Translator Motor Drive. Removed from Lam/Drytek ASIQ ...	SLO SYN 440-TH10	used	$200.00
Switching Systems International DC Power Supply / SQV402-1022-2 New in the box!! SSI Model SQV402-1022-2 Used on Drytek 384T computer ...	20-0017-02502	NEW	$600.00
Switching Systems International (SSI) 15 VDC / SQM-200 Switching Systems International (SSI), 15 VDC power supply. Removed from Lam/DryTek ASIQ. ...	20-0028-152-7	Used	$150.00
Tegal 901e/903e Software Software for Tegal 901e/903e. Part # 26-041-022 S/N 26012, CM 1104-10402	26-041-022	good	$1,750.00
Tegal 903e Manuals Set of two Tegal 903e Manuals. Installation/Warranty and Operation Manuals.	MI-1215-00001 Rev F	Used	$200.00
Tegal Ceramic Ring Insulator New in the box Tegal Ceramic Ring Insulator P/N 40-140-001 billyliles@aol.com	40-140-001	New	$800.00
Tegal MBE-4 Tegal  MBE-4 P/N 99-2007-004 Rev CRemoved from end users store room, condition ...	99-207-004	unk	$200.00
Tegal Lower Electrode Bellows Tegal Lower Elecrode Bellows P/N 33-085-002 Rev DNew in the Box!!billyliles@aol.com	33-085-002 Rev. D	New	$800.00
Tegal Shuttle Position Harness Tegal Shuttle Position Harness for 9XX models. 94-136-001billyliles@aol.com	94-136-001	NEW	$300.00
Tegal Sensor Tegal Sensor for 9XX model. 99-165-003billyliles@aol.com	99-165-003 REV J ESI-3	New	$250.00
Tegal Pneumatic Cylinder Compact Air Products Pneumatic Cylinder Model QJ85-252-D. Tegal part # 80-080-077 for ...	80-080-077	new	$200.00
Tegal/Digital VT-520 Monitor VT-520 monitor used with Tegal 9XX series tools. Used. We also have ...	VT-520	Used	$150.00
Varian ADAC PCB Subassy Removed from Varian CPU assembly. billyliles@aol.com	1043541009 rev A	used	$1,200.00
Varian Angle Valve / NW40 A/O New Varian NW40 A/O Angle Valve, Air Operated, KF40 Fittings	1243-L6281-303	New	$200.00
Varian Interface Logic PCB ASSY Removed from CPU control box.billyliles@aol.com	E-E15001020 rev 3	used	$500.00
VAT ISO Valve ISO NW 100. Valve was packed in rebuild bag. We think that's ...	F12-71673-02	Used	$300.00
VAT 8" Gate Valve / PM-5 Valve was removed form a Lam A-4 oxide chamber. Lam Part # ...	64246-XE52-1108	Used/Opens/ Closes	$2,150.00
VAT F12 / Gate Valve S/N F12-88030/002, File # 12040-PA14-0002 3 7/8" ID, 6 1/2" OD, 21" ...	F12	used	$300.00
XYCOM AOUT XVME-530 Used Xycom AOUT XVME 530 VME Removed from Drytek Etcher billyliles@aol.com	70530-001	used	$400.00
XYCOM DIO XVME-240 Xycom DIO XVME-240. Removed fro Drytek/Lam computer. billyliles@aol.com	70240-001	used	$400.00