Logan Technologies, L.P. is a seller and broker of new, pre-owned, used, excess, and surplus semiconductor fabrication equipment, electronic test equipment, and spare parts. We deal in equipment and spare  parts used in the fabrication, testing, and manufacturing of solar cells and semiconductors.

Semiconductor Parts

Manufature Model Part Number Condition Price

ACEco Lam 490 6" Electrode
6" bottom electrode for Lam 490. New in the box.

ACEco DS33-341

New

$200.00

AMAT P5000 Susceptor Lift
AMAT P 5000 Susceptor Lift, 0010-09340, billyliles@aol.com

0010-09340

used

$500.00

AMAT 8100 RF Match
AMAT 8100 M RF Matching Network. Good condition. logansemi@aol.com

8100M

Used

$1,200.00

AMAT Applied Materials Source Signal Conditioning Bd
AMAT Source Signal Conditioning Bd. 0100-40037. Removed from HDP chamber. billyliles@aol.com

0100-40037

Used

$325.00

AMAT Applied Materials Sync Detect PCB
AMAT sync Detect 0100-00132.billyliles@aol.com

0100-00132

New

$450.00

AMAT Applied Materials Insulator Ground Plate
AMAT 8300 Hexode Insulator Ground Plate ( 2 piece set) 0200-00006-Ebillyliles@aol.com

0200-0006-E

new

$400.00

AMAT Applied Materials Hexode Bottom Plate
AMAT 8300 Hexode Bottom Plate- 0020-04466Billyliles@aol.com

0020-04466

new

$425.00

AMAT Applied Materials Cathode Cover 150 MM
AMAT 8300 Cathode Cover, 0020-04518/A. NEWBillyliles@aol.com

0020-04518/A

new

$500.00

AMAT Applied Materials Silicon Slab
AMAT 5300 Centura Silicon Slab. Not sure about the part #, 13 ...

0200-40013

used

$700.00

Applied Materials Phase/Mag Detector
AMAT Phase/Mag Detector P/N 0010-00215R Rev Gbillyliles@aol.com

0010-00215R

Used

$600.00

Applied Materials AMAT Heater, Roof Top, Grounded
AMAT Roof Top Heater, PIP111, 0190-40182 ref A, Whatlow rev j, billyliles@aol.com

0190-40182

used

$900.00

Applied Materials, AMAT Throttle Valve Controller
AMAT 0015-09077 Rev C, Throttle Valev Controller, billyliles@aol.com

0015-09077

Used

$350.00

Branson / IPC L-3200 60 Day PM Kit
Branson/IPC L-3200 Chamber 60 Day PM Kit. Mfg. by Varitech. billyliles@aol.com

6022000002

New

$250.00

Branson IPC L-3200 Quartz Chamber
Branson/IPC L-3200 quartz chamber. Removed from 150 mm asher. billyliles@aol.com

L-3200

Used

$400.00

Branson IPC EOP Assy
Branson IPC L-3200 EOP Assy. 14967-01, Included EOP PCB 80415884-01. billyliles@aol.com

14967-01

Used

$250.00

Branson/IPC EOP/Pressure Control
Branson/IPC EOP/Pressure Control PCB. PWA 15451-01 Rev Jbillyliles@aol.com

PWA-15451-01 REV J

used

$300.00

Branson/IPC L-3200 Controler Assy
Branson/IPC L-3200 Controler Assy. P/N 13652-01, S/N 10005660, Removed from L-3200 asher. ...

1365201

used

$2,150.00

Brooks Automation Power Supply Assembly
Brooks Automation Power Supply Assembly for 1-3500-2 Wafer Pre-Aligner. billyliles@aol.com  

1-3500-2

used

$850.00

Comet Variable Vacuum Cap / CV03C-1000P/3
Comet 8-1000 pF Variable Vacuum Capicator, 3kv / 1.8kv, Removed from NEW ...

CV03C-1000p/3

new

$1,150.00

Disco Diamond Blade / NBC-Z
Lot of 9 Disco NBC-ZG1050 Diamond Dicing Blades. Size 50.4x0.025x40. billyliles@aol.com

NBC-ZG1050

new

$250.00

Draloric Capacitor / PE 100
Draloric PE 100 14 kvp / 800 pF +- 5% Vacuum Capacitor, ...

14 kvp 800 pF

Used

$100.00

Drytek Quad Reciprocating Bellows
Drytek Quad Recip Bellows $1200 each. New in the Box!billyliles@aol.com 254-773-4070

2100424

NEW

$1,200.00

Drytek RF Power Supply 1000 Watt
Operational Drytek 1000 Watt 13.56 Mhz RF supply. S/N 1126.It powers up ...

2000560

operational

$1,500.00

Drytek Bellows Lower Electrode
Lower Electrode Bellows for Drytek, ASIQ, 384T, Quad tool..billyliles@aol.com

839-250568-001

new

$1,200.00

Drytek VSG81 Fluidic Feedthru
VSG81 Hi Temp Fludic Feedthru. Drytek # 2101384billyliles@aol.com

2101384

New

$700.00

Drytek Lower Assy Drive Motor
Drytek Lower Electrode Assy Drive Motor, Pittman # 14204C223, 30.3 VDCbillyliles@aol.com

601980

used

$300.00

Drytek AMN MK3 Motor Drive PCB
Drytek 384T AMN MK 3 Motor Drive PCB, Assy # 027394, billyliles@aol.com

027393

Used

$275.00

Drytek Door Control Interface
Drytek 384T Door Control Interface Assy # 2800465, P/N 2800464B. billyliles@aol.com

2800465

used

$175.00

Drytek External Keyboard Interface
Drytek 384T External Keyboard Interface Assy, 2800475A. billyliles@aol.com

2800475A

used

$175.00

Drytek AE Generator Interface 384T
Drytek AE Generator Interface 384T, 2801107 Rev 1, Assy 2801108. billyliles@aol.com

2801107

used

$200.00

Drytek 384T HD / Floppy
Drytek 384t Hard Drive and Floppy Drive. billyliles@aol.com

384t

used

$400.00

Drytek / Lam AMN MK3 Control PCB
Drytek ASIQ AMN MK3 Control PCB, 027355 rev 9. Removed from new ...

027355 rev 9

New

$500.00

Drytek / Lam Bottom Baffle 100, 125, 150MM
601179, New Bottom Baffle for Drytek 100, 125, 150 MM tools.

601179

New

$150.00

Drytek / Lam Teflon Stabilizer
2201435 Rev. B Teflon Stablizer for Drytek tools. billyliles@aol.com

2201435

new

$150.00

Drytek / Lam Sensor PCB
New motion sensor for Drytek tools. P/N 2800310B billyliles@aol.com

2800310B

New

$75.00

Drytek / Lam Auto Detector Assy
Drytek Auto Detector ASSY. 2700228. billyliles@aol.com

2700228

New

$550.00

Drytek / Lam Single Axis Servo Interface
Drytek / Lam Servo Interface Single Axis, 2800926 rev 3, Assy 2800927. ...

2800926

used

$125.00

Drytek / Lam AMN MK3 Motor Drive PCB
Drytek ASIQ AMN MK3 Motor Drive PCB, New, 601859 Rev 1. billyliles@aol.com

601859 Rev 1

New

$300.00

Drytek / Motorola MVME 147S
Drytek / Motorola MVME-147S. billyliles@aol.com

2800746

used

$800.00

Drytek / Nucon Microstep Translator PCB
NUCOM Microstep Translator MID014-1002 P/N 2800293billyliles@aol.com

2800293

NEW

$800.00

Drytek / Sony Monitor 384T
Drytek 384T Monitor made by Sony. It tpowers up, but I'm unable ...

384t

Used

$150.00

Drytek / SSI DC Power Supply / SSI
Switching Systems Model SQV402-1022-2. Used in Drytek 384T computer drawer. billyliles@aol.com

853-08597-001

New

$600.00

Drytek Lam ESC Wafer Lift Assembly
Drytek 384T/ASIQ/Quad ESC wafer lift assembly, removed fron new ESC complete assembly. ...

unknow

New

$800.00

Drytek Lam Cassette Door Lift Valve Assembly
Drytek/Lam 384t/ASIQ/Quad Cassette Door Lift Valve assembly, NEW billyliles@aol.com

2201036

New

$500.00

Drytek/Lam 200MM Lower Electrode
New 200 MM Lower Triode Electrode 601743billyliles@aol.com

601743

New

$1,200.00

Drytek/Lam Upper Electrode Diffuser
Upper Electrode Difusser for 150 MM ASIQ or 384T. Used. billyliles@aol.com 4 ...

715-250599-001

used

$125.00

Drytek/Lam Lower Electrode 200MM 038 Step
New in the box!! Lower electrode 200 MM 038 stepbillyliles@aol.com

601743

NEW

$1,200.00

Drytek/Lam Ceramic Wafer Clamp
150 MM Ceramic Wafer Clamp. Cleaned by Varitech International. Used in ASIQ's ...

2301856

New

$300.00

Drytek/Lam Plasma Applicator Tubes
Varitech VT PN 5009106144. Drytek PN 2301794, Microwave applicator tubes. billyliles@aol.com

2301794

New

$650.00

Drytek/Lam Plasma Arrestor / 384T
Three 384T Plasma Arrestors. . $300 each.billyliles@aol.com

600756

Used

$300.00

Drytek/Lam Video PCB
New VGME-1024 Vidio Card for Lam/Drytek ASIQ or Quad tool.billyliles@aol.com

VGME-1024

used

$400.00

Drytek/Lam ASIQ parts
We have 2 Lam ASIQ tools that we plan to sell for $15k each. ...

misc

$15,000.00

Drytek/Lam ESC Power Supply
Drytek / Lam 384T ESC power supply. Assy # 2801153, PCB # ...

2801153

Used

$300.00

Drytek/Lam End Point Amplifier
Lam/Drytek End Point Amplifier Assembly. Removed from Lam/Drytek ASIQ. We have several ...

023914

Used

$250.00

Drytek/Lam Cassette Drive Bellows Assy
NEW in the Box. Cassette Drive Bellows Assy for Drytek. billyliles@aol.com 254-773-4070

2201143-PR

new

$1,500.00

Drytek/Lam RS 232 Interface PCB
Lam ASIQ RS-232 Interface PCB. Assembly # 2800880. Used. Sold "as is". ...

2800878 Rev. 3

used

$275.00

Drytek/Lam Mid ESC Plate
9500/ASIQ/384T Mid ESC Plate 715-249333-001.billyliles@aol.com

715-249333-001

New

$800.00

Drytek/Lam 384T Transfer Loadlock
Drytek / Lam 384T 150 MM Transfer Loadlock chamber. billyliles@aol.com

384T 150 MM

Used

$2,500.00

Drytek/Lam 101 P2 Adapter
P2 101 Adapter PCB used on Drytek/Lam VME computers. billyliles@aol.com

2800902 Rev4

Used

$200.00

Drytek/Lam Triode IO PCB
Part came out of an end users store room.

2800899 Rev 5

Used

$300.00

Drytek/Lam 200 MM Ring Electrode Clamp
Drytek 200 MM Ring Electrode Clamping 601650 Rev 3billyliles@aol.com

601650

New

$800.00

Drytek/Lam RF Interface PCB
ASIQ RF Interface PCB. billyliles@aol.com

2800921

New/used

$300.00

Drytek/Lam Transport I/O PCB
Srytek Transport I/O PCB. P/N 2800911 rev 7, Assy 2800912billyliles@aol.com

2800911 Rev 7

Appears Unused

$400.00

Drytek/Lam Gas Interface PCB
ASIQ Gas Interface PCB.

2800893 Rev 4

Appears Unused

$300.00

Drytek/Lam Quad Dual Overcurrent Assy
Drytek Dual RF Supply Overcurrent Monitor Assembly, New in the Box.billyliles@aol.com

2600452

New

$900.00

Drytek/Lam ESC Plasma Arrester
Drytek 384t ESC plasma arrester weldment.billyliles@aol.com

2301911

New

$800.00

Drytek/Lam Wafer Lift Pin Kit
Includes 3 lift pins # 602120 and Pin removal tool # 600947

600749

New

$250.00

Drytek/Lam PCB / MVME-121
Removed from a Drytek/Lam ASIQ computer.

MVME-121

Used

$500.00

Drytek/Lam Ball Screw Assembly
New part that is used on Drytek/Lam ASIQ/Quad.billyliles@aol.com

715-250594-001

New

$600.00

Drytek/Lam Keyboard Filter Assembly
Removed from Drytek ASIQ/Quad tool. Includes P/N 2801110 PCB and 2800475 PCB.

2801111

Used

$200.00

Drytek/Lam 384T Ver 3.80 Software
New Version 3.80 W/PROM for Drytek 384T, P/N 5540380billyliles@aol.com

5540380

New

$1,000.00

Drytek/Lam AMN ISO Interface
Drytek 384T  AMN ISO Interface ASSY. 2801022billyliles@aol.com

2801022

used

$300.00

Drytek/Lam Temp Sensor Cable MPS-6
Temp Sensor Cable Assy MPS-6.

2002023

New

$200.00

Drytek/Lam STAT QTZ BTTM Triode ASSY
Drytek Static Quartz Bottom Triode Assembly 2301205billyliles@aol.com

2301205

New

$3,000.00

Drytek/Lam Bottom Chamber Ceramic
Bottom Chamber Ceramic HT System. New cost is $7000. Our cost $2000. ...

2100988

New

$2,000.00

Drytek/Lam Fiber Optic Cable
New 7 legged Fiber Optic Control Cable. P/N 026067billyliles@aol.com

026067

New

$500.00

Drytek/Lam Power Supply Jetlight
NEW in the BOX!!!

601852

NEW

$175.00

Drytek/Lam Ring Clamp 200mm
Drytek/Lam 200 MM Ring Clamp.602046billyliles@aol.com

602046

New

$900.00

Drytek/Lam AE Generator Interface
AE Generator Interface 384T, 2801107 Rev 1billyliles@aol.com

2801107

used

$200.00

Drytek/Lam Electrode, ESC, 150MM, 384T
Drytek/Lam 150 MM Lower Electrode ESC for ASIQ, 384T, Quadbillyliles@aol.com

839-080570-001

New

$950.00

Drytek/Lam HSG UV Light
Drytek HSG UV Lightbillyliles@aol.com

601800

NEW

$200.00

Drytek/Lam I/O PCB A ASSY 384T
384T I/O Board A ASSY   billyliles@aol.com

2800014

NEW

$300.00

Drytek/Lam CPU/SER/GRAPH INTF ASSY 384T
384T CPU/SER/GRAPH INTF ASSY

2800600

NEW

$500.00

Drytek/Lam ASIQ Software / Rev 4.81
ASIQ software Revision 4.81, 3-disc.

5540481

Used

$400.00

Drytek/Lam Power Distribution Box
Complete ASIQ Power Distribution Box. Removed from a working Tool.

ASIQ PDB

Used

$2,000.00

Drytek/Lam 4 Channel End Point AMP
New 4 channel endpoint amp  with fiber optic cable. # 2700251billyliles@aol.com

2700251

New

$600.00

Drytek/Lam ASIQ Matching Network
NEW in the Box. ASIQ RF Matching network. We also have -1's, ...

601941-3

NEW

$6,000.00

Drytek/Lam J type Upper Electrode
J-Type Upper  Electrode Assy, Manual, Quad, 384T, ASIQ, NEW in the Box.billyliles@aol.com

2301728

NEW

$5,000.00

Drytek/Lam 384T 6" ESC Chamber Assy
New in the Box. ASSY, 6", Chamber ESC 150 mm 384T. Quad, ...

853-080202-150

NEW

$6,000.00

Drytek/Lam Lower Electrode Assy
New in the Box! Lower Electrode ASM 150 Ballscrewbillyliles@aol.com

602169-2

NEW

$5,000.00

Drytek/Lam Microwave Lower Assy
Complete Microwave Lower electrode assy. New cost is $29000.Includes ceramic and chuck. ...

2301838

NEW

$6,000.00

Drytek/Lam Insulator, ESC
Insulator Ring, ESC, 9500, ASIQ, 384T. New in the box.

716-249268-003

NEW

$700.00

Drytek/Lam Focus Ring / 384T
New in the Box!! Ring, Focus, 150 MM, ESC, 384T billyliles@aol.com

716-080177-001

NEW

$200.00

Drytek/Lam Wafer Lift Pin
Cartridge Lift Pins 602120

602120

New

$75.00

Drytek/Lam Quad Keyboard
New in the box Drytek/Lam Keyboard Assy.

3000111

New

$500.00

Drytek/Lam New Spare Parts
Just arrived a truck load of Drytek/Lam 384T, ASIQ, Quad spare parts.All ...

Various

NEW

Call

Drytek/Lam Process Chamber/Slot Valve Kit
Anodized Process Chamber Slot Valve Kit for ASIQ/384T/Quad toolsbillyliles@aol.com

2100938

New in the Box

$800.00

Drytek/Lam PLT Bottom, ESC, ASIQ/384T
Chamber bottom plate, ESC, 384T and ASIQ

715-080490-001

New in the Box

$400.00

Drytek/Lam 150 MM Electrode, ESC, 384T
150 MM ESC Electrode, 384T, ASIQ, 384T, Quadbillyliles@aol.com

2301913

New in the Box

$900.00

Drytek/Lam Focus Ring, ESC 384T
Ring, Focus, SPCL, 150 MM, ESC, 384Tbillyliles@aol.com

716-080600-001

New

$200.00

Drytek/Lam 2 KW Driver Module
2k Driver module. P/N 2800256 rev. 6billyliles@aol.com

2600347

NEW

$1,000.00

Drytek/Lam Dual Power Control Module
Used on Drytek RF supply. Billyliles@aol.com

2600446

NEW

$700.00

Drytek/Lam Dual Overcurrent Monitor PCB
Dual Rf overcurrent Monitor PCB NEW billyliles@aol.com

2800385

NEW

$430.00

Drytek/Lam 125MM Quartz Insulator Ring
New in the box 125MM Quartz Insulator Ring. P/N 026085 billyliles@aol.com

026085

NEW

$300.00

Drytek/Lam Magnetron PS Interface PCB
Lam Research/Drytek Magnetron PS Interface PCB. Remove ASIQ tool. Two in stock. ...

2801145

used

$200.00

Drytek/Lam AMN VME MUX
Drytek 384T AMN-VME MUX ASSY # 2801019billyliles@aol.com

2801019

used

$100.00

Drytek/Lam OSC Buffer Module
OSC buffer module for drytek rf supply. NEW billyliles@aol.com

2600346

new

$700.00

Drytek/Lam HSG UV Light
Drytek/Lam HSG UV Light. 601800, NEW. billyliles@aol.com

601800

New

$400.00

Drytek/Lam Shield, DK SPC, Clamp
Drytek Dark Space Shield Clamp, NEW P/N # 601648billyliles@aol.com

601648

NEW

$400.00

drytek/lam Transfer Cover / Clear Lexan
P/N 2201267 Rev D, Clear Lexan Transfer chamber cover. 16 1/2" Diameter. ...

2201267

new

$500.00

DryTek/Lam Quad Shower Head
Quad shower head. 2300654billyliles@aol.com

2300654

New

$1,200.00

Drytek/Lam Al Etch Chamber
Complete Al Metal Etch chambers. Chambers were removed from a Drytek/Lam ASIQ ...

ASIQ 150MM

used

$4,000.00

Drytek/Lam Lower Electrode Assembly
New Brake mofified lower electrode assy.billyliles@aol.com

602058

new

$1,900.00

Drytek/Lam End Point Channel Assy
End point channel assy, 4 channel, new in the box. 2700253.billyliles@aol.com

2700253

$600.00

Drytek/Lam Upper Electrode 100-25-50 AL
Drytek Upper Electrode 100-25-50 Aluminum 026182billyliles@aol.com

026182

NEW

$700.00

Drytek/Lam Dual Monitor Overcurrent ASSY
Drytek Dual Monitor Overcurrent ASSY for Dual RF GeneratorP/N 2600452billyliles@aol.com

2600452

NEW

$800.00

Drytek/Lam System Interface/384T
System Interface PCB for 384T. PN 2800602 Rev 9. Assy # 2800604billyliles@aol.com  ...

2800602 Rev 9

Used

$300.00

Drytek/Lam 125 MM Insulator Ring
Drytek 125 MM Quartz Insulator Ring for ASIQ, Quad, and 384T tools. ...

026085

New

$300.00

Drytek/Lam 125 MM Wafer Clamp
Drytek 125MM HF 60 DEG Wafer Clamp # 2101362billyliles@aol.com

2101362

NEW

$400.00

Drytek/Lam Ground Grid
Drytek 100-150 MM Metal Ground Grid, 11MM, # 2301817 NEWbillyliles@aol.com

2301817

New

$400.00

Drytek/Lam Pittman 30.3 VDC Motor
Pittman 30.3 VDC Motor. Pittman # 14304C223. Drytek/Lam # 2002981.Removed from 384Tbillyliles@aol.com

2002981 / 14204C223

Used

$250.00

Drytek/Lam REF BTM Triode FIN Mach Oxide
Drytek REF Bottom Triode FIN MACH OXIDEbillyliles@aol.com

2300753-PR

New

$900.00

Drytek/Lam 150 MM ESC Chuck
Drytek Anodized 150 MM Bottom ESC Electrode Chuck. 2301913billyliles@aol.com

2301913

NEW

$1,800.00

Drytek/Lam Lower ESC Insulator Teflon
Lower ESC electrode insulator for Drytek 150 MM ESC.billyliles@aol.com

ESC Insulator

NEW

$400.00

Drytek/Lam HSG Lower Electrode
HSG Lower Electrode 384T. billyliles@aol.com

715-080084-001 Rev E-1

new

$1,500.00

Drytek/Lam Liner, HSG, ESC
ASIQ/384T/Quad Liner, HSG, ESCbillyliles@aol.com

713-080492-001

new

$600.00

Drytek/Lam Lower Electrode Quad, 8" domed
Quad lower electrode . 8" domedbillyliles@aol.com

715-018611-115

NEW

$1,400.00

Drytek/Lam Lower Electrode Insulator Ring
Drytek Lower Electrode Insulator Ring "ceramic". 100 mmbillyliles@aol.com

023813

NEW

$400.00

Drytek/Lam TEMP Sensor Cable ASSY MPS-6
New Temp Sensor Cable Assembly MPS-6billyliles@aol.com

2202023

new

$150.00

Drytek/Lam ROBOT ARM Sensor Harness
NEW ROBOT ARM Sensor Harness Ribbonbillyliles@aol.com

2001384

New

$100.00

Drytek/Lam 350 Deg C Wafer Sensor BD ASSY
350 Degree C Wafer Sensor Board Assembly "NEW"billyliles@aol.com

2800905

New

$300.00

Drytek/Lam Resistor Network
New Resistor Network 2004140 Rev 5 for Drytekbillyliles@aol.com

2004140

New

$300.00

Drytek/Lam AE Generator Interface
Lam/Drytek AE Interface PCB, PN 2801100 rev.1, Assy 2801101.billyliles@aol.com

2801100

New

$400.00

Drytek/Lam ASIQ AE Generator Interface
Drytek/Lam ASIQ AE RF Generator Interface, 2801220, Assy # 2801221billyliles@aol.com

2801220 REV E1

Used

$400.00

Drytek/Lam Interlock Protection PCB
Lam Interlock Protection PCB, P/N 2800937, Assy # 2800938billyliles@aol.com

2800937 Rev 2

New

$200.00

Drytek/Lam Disk Interface PCB
Drytek Disk Interface PCB, P/N 2800481A, Assy # 2800482billyliles@aol.com

2800481A

Used

$200.00

Drytek/Lam Stepper Interface PCB
Drytek Stepper Interface PCB, P/N 2800296 B, assy # 2800295billyliles@aol.com

2800296 B

Used

$300.00

Drytek/Lam Gas Interface PCB
Drytek / Lam Gas Interface PCB, P/N 2800893 Rev 4, Assy # ...

2800893 Rev 4

Used

$300.00

Drytek/Lam CPU/Serial/ Graphics Interface PCB
Drytek/Lam 384T, CPU/Serial/Graphics Interface PCB #2800598 rev 10, Assy # 2800928billyliles@aol.com

2800598 Rev 10

Used

$500.00

Drytek/Lam Process Chamber EXH Heater
Drytek Process Chamber EXH #1 2101292billyliles@aol.com

2101292

New

$200.00

Drytek/Lam Chamber Heater
Drytek Chamber Heater, 2101299billyliles@aol.com

2101299

New

$400.00

Drytek/Lam Process Chamber Bellows Heater
Drytek Process Chamber Bellows Heater, 2101288billyliles@aol.com

2101288

New

$150.00

Drytek/Lam Output Pipe Heater
Drytek Output Pipe Heater, 2101297billyliles@aol.com

2101297

New

$100.00

Drytek/Lam Heater Blanket Tutbo Manifold 11
Drytek Heater Blanket Turbo Manifold 11, 2101393billyliles@aol.com

2101393

New

$150.00

Drytek/Lam Heater Blanket Turbo Manifold
Drytek Turbo Heater Blanket, 2101394billyliles@aol.com

2101394

New

$150.00

Drytek/Lam Process Chamber EXH Heater #2
Drytek Process Chamber EXH Heater #2, 2101293billyliles@aol.com

2101293

n

$150.00

Drytek/Lam S.S. SiC Pin Housing
Drytek/Lam Stainless Steel SiC Pin Housing. New, 839-249332-001 rev 1billyliles@aol.com

839-249332-001 rev 1

New

$200.00

Drytek/Lam 384T 150 MM ESC Oxide Etch Chamber
Drytek / Lam 384T 150 MM ESC Oxide Etch Chamber. Complete. billyliles@aol.com

384T Etch Chamber

Used

$2,500.00

Drytek/Lam 384T Computer Assembley
Complete Drytek "VME" 384T Computer Assemblybillyliles@aol.com

384T Computer

Used

$3,000.00

Drytek/Lam ASIQ Matching Network
New in the Box, ASIQ Automatic RF Matching Network, PN 601941-1billyliles@aol.com

601941-1

New

$6,000.00

Drytek/Lam Ring Electrode Clamp 150 MM
Ring Electrode Clamp 150 MM, New in the Box! 600582billyliles@aol.com

600582

New

$400.00

Drytek/Lam Bottom 150 mm Triode Oxide Chuck
Drytek Bottom Triode Oxide Chuck with left. PN 2300753-PR150 MMbillyliles@aol.com

2300753-PR

New

$1,200.00

Drytek/Lam 200 Upper Electrode
200 MM Upper Electrode 600930 NEWbillyliles@aol.com

600930

New

$1,200.00

Drytek/Lam 200 MM Quartz LWR Insulator
200 Lower Electrode Quartz Insulator 600912 NEWbillyliles@aol.com

600912

New

$300.00

Drytek/Lam Lower Ring Wafer Clamp 4"/5"
Drytek/Lam Lower Ring Wafer Clamp for 4" and 5" wafers. 026311billyliles@aol.com

026311

new

$500.00

Drytek/Lam Coupler ASM ASIQ AMN
Drytek ASIQ AMN Coupler ASM, NEW, 601947billyliles@aol.com

601947

New

$800.00

Drytek/Lam AMN Interface ASSY
AMN Interface Assy 042647 Rev 5billyliles@aol.com

042647

used

$100.00

Drytek/Lam AMN Mk 3 Motor Drive
Drytek Mark 3 Motor Drive Assy # 027394billyliles@aol.com

027394

used

$300.00

Drytek/Lam AMN Mk 3 Motor Drive
Drytek Mark 3 Motor Drive ASSY # 601858billyliles@aol.com

601858

used

$300.00

Drytek/Lam AMN Display
Drytek/Lam 384T AMN Display Board, 2800816 Rev 1. Assy 2800818billyliles@aol.com

2800816

used

$300.00

Drytek/Pittman DC Arm Motor
ASIQ DC Arm motor. 14204C662 , 30.3 VDCbillyliles@aol.com

2004031

Used

$200.00

Drytek/Robitech PCB / 8 Valve Module
We also have several used ones in stock that were removed from ...

980-4825 S/N 31525

New

$400.00

Drytek/Robitech 4 Valve Module PCB
Robitech P/N 980-4525

3000120

new

$400.00

Drytek/Robitech Robitech Pneumatic Assy
Robitech Pneumatic Assy used with DRYTEK ASIQ tool. Includes: Pheumatic Interface PCB ...

990-9080

Used

$1,500.00

Drytek/Superior Electric Stepper Motor / M092-FD-302
Drytek Quad stepper motor assembly. 200oz. in., 200 steps per rev,1.65 v, ...

2201309

Used

$200.00

Eaton Relay Driver Status Interface PCB
Eaton Relay Driver / Status Inerface PCB, 0303-0018, 5990-0021, New, billyliles@aol.com

0303-0118

New

$200.00

Eaton PCB ASSY / Micro-Step
New Eaton Mirco-step PCB 0342-1649-006 rev H, Software rev 2.07billyliles@aol.com

0342-1649-006 Rev H

NEW

$400.00

Eaton PCB ASSY, Micro-Step
New Eaton PCB ASSY, Micro-Step 0342-1649-004, REV H Software rev 2.05billyliles@aol.com

0342-1649-0004 Rev H

New

$400.00

Eaton PCB ASSY, Magnet PS
Eaton Magnet Power Supply 0342-0254-3001billyliles@aol.com

0342-0254-3001

New

$600.00

Eaton Beam Current AMP
Eaton Beam Current AMP P/N 5990-0097-0001Removed from end-users store room.billyliles@aol.com

5990-0097-0001

new

$600.00

Edwards PV40PKS-Lam
Edwards PV40PKS- Lam Switch : 24 V .25A Max Pressure: 7 Bar ...

C41419000

$150.00

Flexco Microwave Braided L/C RF Cable
29" long Braided L/C RF Cable.  Manufactured by Flexco Microwave for Lam/Drytek ...

601279

used

$250.00

Fusion PWB
Fusion Semiconductor Assy # 61981 Rev B for Fusion Model 150.billyliles@aol.com

61981

used

$200.00

Fusion Semiconductor Lamp Power Supply Interface
Fusion Semiconductor Lamp / Power supply Interface P/N 265842 Rev FRemoved from ...

265842

Used

$300.00

Fusion Semiconductor LCD Interface & System Interconnect
Fusion Semiconductor LCD interface / System Interface 286112 Rev Dbillyliles@aol.com

286112

Used

$300.00

Galil Motion Galil Motion DMC-300-10 PCB
New in the box. Galil Motion DMC-300-10 Board Assembley Drytek P/N 600974 ...

600974

New

$600.00

Galil Motion Servo Control
Galil Motion SSA/12/55 Servo Control PCB. logansemi@aol.com

SSA-12/55

used

$250.00

Galil Motion Motion Controller
Galil Motion ESA-10/75H, Motion Controller, removed from Drytek 384T. billyliles@aol.com

esa-10/75H

Used

$300.00

Gasonics Teflon Ring
Teflon Ring for Gasonics model L-3200 for 6" chamberbillyliles@aol.com

14382-01

Good

$400.00

Gasonics DC Driver PC Board
Gasonics L series DC Driver, Also have rev A, All look unused.

13014-02 Rev C

unk

$200.00

Gasonics CPU-Process, PWA
Gasonics L series, Looks unused.

14909-01

unk

$200.00

Gasonics Display Assembly
Gasonics 3510 / 3010 Dispaly assembly. 95-0296 rev c. billyliles@aol.com

95-0296 rev c

used

$1,200.00

Gasonics Lamp Control Module
Gasonics A-3010 Digital Lamp Control Module. billyliles@aol.com

A3010

used

$550.00

Gasonics Lamp Control Module
Gasonics A-3010 Digital Lamp Control Module. billyliles@aol.com

A3010

used

$550.00

Graphic Strategies VGME-1024
Drytek 3001013, Graphic Strategies VGME-1024-4L Rev A. NEW, Used on Drytek / ...

VGME-1024-4L Rev A

used

$400.00

Green Spring VMEbus IP Carrier Board
VIPC610 GreenSpring VMEbus Carrier Board. Drytek P/N 2800842 billyliles@aol.com

VIPC610

Used

$300.00

HPS / MKS KF50 Vlave
HPS/MKS phenumatic KF-50 Isolation Valve, New, billyliles@aol.com

KF50 / NW50

New

$325.00

IDEC Full Color Mark Sensor
IDEC SAIK-FIN3 Full Color Mark Sensor NPN Open C 28 VDC max, ...

SAIK-FIN3

used

$250.00

Jennings Vacuum Capacitor
8-1000 pf 3KV, Jennings CMV1-1000-0303 Vacuum Capacitor,  NEW NEVER USED, MISSING BOXES.billyliles@aol.com

CMV1-1000-0303

NEW

$1,150.00

KLA-Tencor Relay Driver Board
KLA-Tencor Prometrix Relay Driver BD, NEW in the Box. 54-0068billyliles@aol.com

54-0068

New

$300.00

Lam End Point Detector
Lam optical end point detector. Part was taken off an Alliance oxide ...

852-494005-001-B-3614

Used

$500.00

Lam Alliance A-4 Gap Assembly
Removed from Lam Alliance A-4 chamber. Complete assembly # 853-491592-001-A-3117. Includes PCB ...

853-491592-001-A-3117

Used

$1,700.00

Lam Expansion PCB
Lam Expansion PCB, Removed from end-users store room. 605-016006-001billyliles@aol.com

605-06006-001

New

$800.00

Lam Controller PCB
Lam Controller PCB, 605-016005-001. Taken from end users store room.billyliles@aol.com

605-016005-001

Used

$700.00

Lam ESC Power Supply
ESC power supply removed from Alliance A-4 9500 module. We have three ...

853-250758-001-1-221

Used/Unknow

$500.00

Lam Water Level Monitor
Water Level Monitor used on Lam and Drytek tools.

853-034162-001-1

New

$400.00

Lam Upper Electrode
Lam upper electrode, we used it with N2 only. billyliles@aol.com

715-011531-016

Barely used

$225.00

Lam Roller Chain #35 75"
750-007782-001, 75" roller chain, #35. billyliles@aol.com

750---7782-001

new

$65.00

Lam upper Electrode, AL, Anodized
Upper Electrode AL, Anodizedbillyliles@aol.com

715-011531-014

New

$800.00

Lam Capacitor Motor Drive Assy
Lam RF Match Variable Capacitor Drive Assy. Remove from 9500 Alliance. billyliles@aol.com

853-250081-005

Used

$300.00

Lam RF Coupler assy
Lam RF Coupler assy. Removed from Alliance A-4 oxide chamber. billyliles@aol.com

853-033766-005-1-3999

Used

$300.00

Lam Alliance VME Enclosure
Lam A-4 VME Enclosure, 853-370026-001-C-MDFTVME # 05-1005970-98 rev Abillyliles@aol.com

853-370026-001

Used

$750.00

Lam Serial I/O 392A
Lam Research Serial I/O PCB 392A. Removed from end-users store room.billyliles@aol.com

392-1-B-569-186

New

$300.00

Lam Ceramic Gas Ring
Lam Gas Ring Ceramic, P/N 716-330068-001, New in the Box!billyliles@aol.com

716-330068-001

New

$800.00

Lam Optic Lens
Lam Optic Lens, 716-250579-001. billyliles@aol.com

716-250579-001

New

$50.00

Lam Gap Drive Control PCB
Lam Gap Drive Control PCB billyliles@aol.com

810-17093-002

Used

$700.00

Lam Gap Motor Controller
Lam Gap Motor Controller PCBbillyliles@aol.com

810-017098-001

Used

$700.00

Lam Rf Halo Intfc
Lam Alliance A-4 RF Halo Interface PCB, 810-034806-003 Rev Abillyliles@aol.com

810-034806-003

Used

$250.00

Lam Bottom Wafer Clamp
New in the box, 4520 8" Bottom Wafer Clamp, 716-028721-288billyliles@aol.com

716-02871-288

new

$600.00

Lam Plate Wafer Clamp 4"
Lam 4" Plate wafer clamp. PN 716-011580-246, NEW.billyliles@aol.com

716-011580-246

New

$900.00

Lam Pittman Motor Drive
Pittman 14204C223 30.3 VDC, Lam 853-440942-001, billyliles@aol.com.

853-440942-001-A-220

used

$350.00

Lam TCP AutoTune PCB
Lam TCP Autotune PCB, 810-15987-001, billyliles@aol.com

810-15987-001

Used

$600.00

Lam Solenoid Interlock PCB
Lam Solenoid Interlock PCB. 810-17004-001 rev 4billyliles@aol.com

810-17004-001 rev 4

New

$200.00

Lam Auto Etch Gas Manifold
Lam Auto Etch Gas Chamber Feed Manifold, 6 gases, SS 4BK Nupro ...

839-007964-1

New

$900.00

Lam RF Manual Module
Lam Top RF Manual Module billyliles@aol.com

853-015982-001

Used

$125.00

Lam Mini Match Manual Module
Lam MINI Match RF Manual Module 853-015030-001-5-C136billyliles@aol.com

853-015030-001

Used

$125.00

LAM ADIO
Lam ADIO PCB, 810-17031-01billyliles@aol.com

810-17031-01

Used

$400.00

Lam RF Generator Breakout Bd
Lam RF Generator Cart Breakout BD. 810-17025-3. billyliles@aol.com

810-17025-3

Used

$200.00

Lam TCU Interconnect Cable
Lam Rainbow to 2080 TCU interconnect cable, 70', billyliles@aol.com

853-017824-060

used

$300.00

Lam Electrode Ring, Upper
Upper Electrode Ring, used with N2 only. billyliles@aol.com

715-028552-001

Barely used

$150.00

LAM RESEARCH ANALOG INPUT PCB
LAM RESEARCH 490/590 ANALOG INPUT PCB 810-01317-001. BILLYLILES@AOL.COM

810-01317-001

USED

$300.00

Matrix 403 Operation/Installation Manual
System One Etcher Installation/ Operation Manual on clean room paper.

0995-998844

Used

$150.00

Matrix 105 Installation/Operation Manual
System One Stripper Installation/Operation Manual on clean room paper.

0995-99848

Used

$150.00

Matrix Process Controller
Matrix Process Controller, 1000-0027 Rev CRemoved from end users store room, but ...

1000-0027 Rev C

New

$1,500.00

Matrix Panel Switch and Dispaly Cover
Matrix Panel Switch and Display cover. 0995-10532billyliles@aol.com

0995-10532

New

$300.00

Maury Microwave 4095 Directional coupler
Maury Microwave model 4095 Precision High Direcrivity Directional coupler, NIB, billyliles@aol.com

4095

New

$200.00

MKS Throttle Valve
MKS 253A-3-2-2 Vacuum Throttle Valve. Working, billyliles@aol.com

253A

Used / Operational

$277.00

MKS 722 10 TORR BARATRON

722

USED

$250.00

MKS Baratron / 100 Torr
MKS 122AA-0010088, 100 Torr,  S/N 95090337A. Removed from an operational tool, but ...

12AA-0010088

Used

$150.00

MKS Pressure Controller / 152E
S/N 36255-1-1c. Includes interconnect cables. Removed from Drytek 384T. Opens and closes ...

152E-PO

operational used

$650.00

MKS BARATRON HEAD

390HA-00010SP05

USED

$300.00

MKS VACUUM SWITCH 141AA
MKS 141AA-00010BB-S, 10 TORR VACUUM SWITCH, 3 TORR SPST. logansemi@aol.com

141AA-00010BB-S

USED

$300.00

MKS Pressure Transducer
MKS Model 122AA-00100AB , 100 torr pressure transducer. billyliles@aol.com

122AA-00100AB

Used

$150.00

MKS Baratron
MKS 127AA, 1 torr baratron, billyliles@aol.com

127AA-00001B

Used

$200.00

MKS Baratron 122B
MKS 122B-11532, 10 torr Baratron. 1/2" VCR. billyliles@aol.com

122B-11532

Used

$200.00

Modgraph 9" Color Monitor for 384T
New in the Box, Modgraph 9" color monitor for Drytek 384T. Works ...

MG 3930

New

$400.00

Motorola Motorola MVME 147S-1
Removed from a Drytek/Lam 384t computer. 84-8577B01D rev AContains Drytek software 5540420 ...

84-W8577B01D Rev A

Used

$800.00

Motorola MVME-101 Stepper PCB

2800473

Used

$400.00

Motorola MVME 121 CPU PCB
Motorola MVME 121  P/N 84-8293801 Rev E, Drytek 2800299billyliles@aol.com

84-W8293801 Rev E

New

$900.00

Motorola MVME 101 SECS CPU
 Motorola MVME 101 SECS CPU.Lam part # 84-W8529B01C Rev ALogan Technologies, 254-773-4070

84-W8529B01C

Used

$600.00

Motorola MVME 712M / P2 Adapter
Motorola MVME 712M with P2 Adapter PCB billyliles@aol.com 254-773-4070

MVME 712M

used

$275.00

Motorola MVME 147S

147S

Used

$800.00

Nucom 50 Watt Stepper Driver Card / DRD002A
NUCON 50 Watt Stepper Driver Card DRD002A, Drytek # 2800294billyliles@aol.com

2800294

NEW

$600.00

NUCON / Drytek Nucon Microstep Translator
New in the box Nucon Mircostep Translator, MID014-1002 Used in Drytek tools. ...

2800293

New

$1,200.00

PEN-RAY UVP / PS-1
PEN-RAY PS-1 UV power supply. Removed from Drytek 384T. billyliles@aol.com

PS-1

Used

$200.00

Pittman Stepper Motor
30.3 Volts, removed from Drytek etcher. $300 each. Drytek # 601980billyliles@aol.com

14204C223

used

$300.00

Robitech Robitech 4 Valve Module
Complete Robitech 4 valve module. Removed from a Drytek 384T. billyliles@aol.com

4 Valve

used

$750.00

Shindengen Electric 24 VDC Power Supply
Shindengen Electric 24 VDC PS. Removed from a Lam/Drytek ASIQ350 Watts, 100 ...

GY24010G

used

$300.00

Superior Electric Slo-Syn Stepping Motor
Drytek PN 2201225 200 oz. in. / 200 step per rev./1.65V/6.8A/DC HZ ...

M092-FD-302

New in the Box

$175.00

Switch systems International SSI STV401-1022-2
SSI STV401-1022-2 DC Ppower supply. billyliles@aol.com

STV401

Used

$350.00

Switching Systems International (SSI) 15 VDC / SQM-200-1333-7
Switching Systems International (SSI), 15 VDC power supply. Removed from Lam/DryTek ASIQ. ...

20-0028-152-7

Used

$150.00

Switching Systems International SSI STV401-1022-2
SSI STV401-1022-2 DC power supply, Removed from Drytek Computer drawer. billyliles@aol.com

STV401-1022-2

used

$400.00

Tegal 903e Manuals
Set of two Tegal 903e Manuals. Installation/Warranty and Operation Manuals.

MI-1215-00001 Rev F

Used

$200.00

Tegal 6" Quartz Ring
Tegal 9XX Quartz Ring for 6" tool. 40-284-005, billyliles@aol.com

40-284-005

New

$300.00

Tegal Electrode Plate
Tegal Super 421 Electrode Plate, 46-013-001billyliles@aol.com

46-013-001

new

$600.00

Tegal MBE-4
Tegal  MBE-4 P/N 99-2007-004 Rev CRemoved from end users store room, condition ...

99-207-004

unk

$200.00

Tegal Lower Electrode Bellows
Tegal Lower Elecrode Bellows P/N 33-085-002 Rev DNew in the Box!!billyliles@aol.com

33-085-002 Rev. D

New

$800.00

Tegal Shuttle Position Harness
Tegal Shuttle Position Harness for 9XX models. 94-136-001billyliles@aol.com

94-136-001

NEW

$300.00

Tegal Sensor
Tegal Sensor for 9XX model. 99-165-003billyliles@aol.com

99-165-003 REV J ESI-3

New

$250.00

Tegal 12" Therocouple
Tegal 421 12" Thermocouple. 80-095-003billyliles@aol.com

80-095-003

new

$150.00

Tegal Set Point Timer PCB
Tegal 421 Set Point Timer PCB, tested good. 99-013-001billyliles@aol.com

99-013-001

New

$300.00

Tegal 421 Heater Cartridge
Tegal 421 Heater Cartridge, 80-095-004billyliles@aol.com

80-095-004

New

$100.00

Tegal Electrode Insulator
Tegal 421 Electrode Insulator, 40-012-001. NEWbillyliles@aol.com

40-012-001

New

$100.00

Tegal Phase MAG Detector
Tegal 9XX Phase Mag Detector P/N 31-086-004 Rev C billyliles@aol.com

31-086-004

used

$300.00

Tegal 150 MM Wafer Carrier
150 mm, 25 slot Aluminum wafer carrier. billyliles@aol.com.

150 mm

used

$100.00

Tegal/Raines AC Control Board
AC Control PCB for Tegal/Raines Super "421".billyliles@aol.com

1097

new

$400.00

TEL Spinner Unit Connection PCB
TEL Spinner unit control unit pcb. 381-640481-1. billyliles@aol.com

381-640481-1

used

$350.00

TEL I/O PCB
TEL TVME-U10#2, I/O PCB 381-640994-2. billyliles@aol.com

381-640994-2

used

$450.00

TEL SSMC-8A
TEL C/C SSMC-8A 381-639383-2. billyliles@aol.com

381-639383-2

used

$450.00

TEL SMC-C85A
TEL SMC-C85A, 381-639006-4. billyliles@aol.com

381-639006-4

used

$450.00

TEL Tokyo Electron SiC ESC Focus Ring
New TEL ESC SiC Focus Ring, 1D10-312204-11billyliles@aol.com

1D10-312204-11

New

$950.00

TEL Tokyo Electron Cover Bell. ESC
TEL ESC Cover Bell. 1D10-311258-11billyliles@aol.com

1D10-311258-11

New

$525.00

Unit Instruments UFC-1200A
Unit UFC-1200A, 1 SLM N2, VCR, billyliles@aol.com

1200A

Used

$175.00

Varian Angle Valve / NW40 A/O
Used Varian NW40 A/O Angle Valve, Air Operated, KF40 Fittingsbillyliles@aol.com

1243-L6281-303

used

$100.00

Varian Interface Logic PCB ASSY
Removed from CPU control box.billyliles@aol.com

E-E15001020 rev 3

used

$500.00

XYCOM AOUT XVME-530
Used Xycom AOUT XVME 530 VME Removed from Drytek Etcher billyliles@aol.com

70530-001

used

$400.00

XYCOM DIO XVME-240
Xycom DIO XVME-240. Removed fro Drytek/Lam computer. billyliles@aol.com

70240-001

used

$400.00