Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.

We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam ASIQ Metal Etcher/Asher cluster tool, and Lam 9500 Alliance chambers. 

Manufacturer Model Condition Price
Noah Precision 2004 Chiller
Model 2004, 208/20A/60Hz
unk $275.00
Leybold OF-1000
Leybold Model OF-1000 oil recirc system. Three in ...
appears good $375.00
BEMAG Transformer
Step down transformer. Part # BC3030P480K20ESC3R, 30 KVA, ...
Good $400.00
FTS Systems Chiller
Recirc cooling system.
unk $400.00
Affinty RWA-007C-CE18CA
Water Cooled, 2 KW, 3 Gallon Minute @ ...
Used $675.00
Blue M WSP-109B
Dual Thermo Shock Oven, 75'C to 200'C. 208V/1Ph/60HZ. ...
Used $775.00
Edwards Pump/Enclosure
Edwards pump enclosure for QDP/QMB series pumps.
appears good $900.00
Gasonics Remote AC Box L-3510
Remote AC Box for Gasonics L-3510
Good $975.00
OSAKA TH-542
Turbo pump, s/n H520-1068, Pump was rebuilt but ...
Excellent $975.00
Lam Dual Channel RF Supply
Lam Dual Channel 13.56 MHZ RF Supply. Model ...
Used/Unknow $995.00
OSAKA Vacuum TG 373/TD370/400
Osaka Vacuum Turbo Pump Model TG 373 with ...
Used $1,175.00
CleanTech 2000S
CleanTech 2000S hand washer. We have several in ...
good $1,275.00
ENI ACG-5 XL
ENI ACG-5 XL RF 13.56Mhz 500 Watt "air ...
Operational $1,450.00
Gaertner L-115B
Gaertner Ellipsometer. Computer needs repair.
used $1,500.00
Lam Automatch
ASIQ automatch part # 60194-1, several in stock.
good $1,875.00
MicroBar TrackMate
S/N 93-05-1143. Remote Track Auto Fill System. Three ...
Used/Unknow $2,000.00
LAM AC Remote Box
Remote box AC box for Lam Rainbow 4420 ...
appears good $2,450.00
Tegal 400 Asher
Tegal model 400 strip/asher/descum. 300 Watt, 13.56 Mhz. ...
Operational $2,450.00
Lam/Drytek ASIQ Transfer Load lock
Lam/ Drytek ASIQ 150MM Transfer Loadlock Chamber.
used $2,500.00
PLASMOS SD-4000
 Complete parts tool. Cassette to Cassette automated Ellipsometer. ...
unk $2,850.00
Asyst APL-2200 SMIF Loader
Part # 9700-3520-02, Three in stock, 200MM Bolt ...
Excellent $2,850.00
Edwards QDP-80
Edwards QDP-80 Dry Pump. 56 CFM, 208 VAC ...
Used/Unknow $4,000.00
Tegal Super 421 Asher/Etcher
Operational Dual channel Barrel asher/etcher. Temperature control, Two ...
Operational $4,750.00
Lam Alliance 9500
Lam Alliance Model 9500. 150MM. It fits onto ...
Used $4,750.00
Lam M/W Power Supply with Chamber
Lam Magnatron power supply, part # 853-080248-001 E-1, ...
Never used $5,775.00
Lam A-4 Gas Box
Lam Gas box used on A-4 Alliance Plateform. ...
Used $6,500.00
Branson/IPC 2000T Barrel Asher/Etcher
Barrel Etcher/Asher 12" Quartz Chamber, 1000 Watt, 13.56MHz ...
Appears good $7,500.00
Technics PlasmaEtch 11
Technics PlasmaEtch 11 Anisotropic Etcher with 30 KHZ ...
Used/Operational $7,750.00
Norcimbus Power Purge lV
"Brand New" Norcimbus three bottle gas cabinet. Two ...
New $8,500.00
Dainippion Screen (DNS) WS-620C SRD
DNS WS-620 150 MM SRD. I think that ...
Unused $12,000.00
Zevatech ESEC CT-2000
S/N 80018. Pick and place.
appears good $15,000.00
Lam ASIQ Etcher/Asher
S/N W-1102-700.021, Removed from Fab as working tool. ...
Excellent $49,500.00
LAM 4420
S/N 20166 and 20069, 200MM, Classic software, ENI ...
Excellent $73,500.00
LAM 4520
S/N  24232. 200mm,CE Marked, Wafer Clamping, Backside Helium, ...
Excellent $149,500.00