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Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.
We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam ASIQ Metal Etcher/Asher cluster tool, and Lam 9500 Alliance chambers.
Manufacturer
|
Model
|
Condition
|
Price
|
|---|---|---|---|
|
Blue M WSP-109B Dual Thermo Shock Oven, 75'C to 200'C. 208V/1Ph/60HZ. ... |
Used | $775.00 |
|
Dainippion Screen (DNS) WS-620C SRD DNS WS-620 150 MM SRD. I think that ... |
Unused | $12,000.00 |
|
BEMAG Transformer Step down transformer. Part # BC3030P480K20ESC3R, 30 KVA, ... |
Good | $400.00 |
|
MicroBar TrackMate S/N 93-05-1143. Remote Track Auto Fill System. Three ... |
Used/Unknow | $2,000.00 |
|
OSAKA TH-542 Turbo pump, s/n H520-1068, Pump was rebuilt but ... |
Excellent | $975.00 |
|
OSAKA Vacuum TG 373/TD370/400 Osaka Vacuum Turbo Pump Model TG 373 with ... |
Used | $1,175.00 |
|
PLASMOS SD-4000 Complete parts tool. Cassette to Cassette automated Ellipsometer. ... |
unk | $2,850.00 |
|
Affinty RWA-007C-CE18CA Water Cooled, 2 KW, 3 Gallon Minute @ ... |
Used | $675.00 |
|
Gasonics Remote AC Box L-3510 Remote AC Box for Gasonics L-3510 |
Good | $975.00 |
|
Edwards QDP-80 Edwards QDP-80 Dry Pump. 56 CFM, 208 VAC ... |
Used/Unknow | $4,000.00 |
|
Edwards Pump/Enclosure Edwards pump enclosure for QDP/QMB series pumps. |
appears good | $900.00 |
|
Norcimbus Power Purge lV "Brand New" Norcimbus three bottle gas cabinet. Two ... |
New | $8,500.00 |
|
Technics PlasmaEtch 11 Technics PlasmaEtch 11 Anisotropic Etcher with 30 KHZ ... |
Used/Operational | $7,750.00 |
|
Leybold OF-1000 Leybold Model OF-1000 oil recirc system. Three in ... |
appears good | $375.00 |
|
Lam M/W Power Supply with Chamber Lam Magnatron power supply, part # 853-080248-001 E-1, ... |
Never used | $5,775.00 |
|
Gaertner L-115B Gaertner Ellipsometer. Computer needs repair. |
used | $1,500.00 |
|
Zevatech ESEC CT-2000 S/N 80018. Pick and place. |
appears good | $15,000.00 |
|
Lam Dual Channel RF Supply Lam Dual Channel 13.56 MHZ RF Supply. Model ... |
Used/Unknow | $995.00 |
|
FTS Systems Chiller Recirc cooling system. |
unk | $400.00 |
|
Branson/IPC 2000T Barrel Asher/Etcher Barrel Etcher/Asher 12" Quartz Chamber, 1000 Watt, 13.56MHz ... |
Appears good | $7,500.00 |
|
Lam Automatch ASIQ automatch part # 60194-1, several in stock. |
good | $1,875.00 |
|
Lam/Drytek ASIQ Transfer Load lock Lam/ Drytek ASIQ 150MM Transfer Loadlock Chamber. |
used | $2,500.00 |
|
Lam ASIQ Etcher/Asher S/N W-1102-700.021, Removed from Fab as working tool. ... |
Excellent | $49,500.00 |
|
Tegal Super 421 Asher/Etcher Operational Dual channel Barrel asher/etcher. Temperature control, Two ... |
Operational | $4,750.00 |
|
Asyst APL-2200 SMIF Loader Part # 9700-3520-02, Three in stock, 200MM Bolt ... |
Excellent | $2,850.00 |
|
Lam Alliance 9500 Lam Alliance Model 9500. 150MM. It fits onto ... |
Used | $4,750.00 |
|
ENI ACG-5 XL ENI ACG-5 XL RF 13.56Mhz 500 Watt "air ... |
Operational | $1,450.00 |
|
LAM AC Remote Box Remote box AC box for Lam Rainbow 4420 ... |
appears good | $2,450.00 |
|
Lam A-4 Gas Box Lam Gas box used on A-4 Alliance Plateform. ... |
Used | $6,500.00 |
|
LAM 4520 S/N 24232. 200mm,CE Marked, Wafer Clamping, Backside Helium, ... |
Excellent | $149,500.00 |
|
LAM 4420 S/N 20166 and 20069, 200MM, Classic software, ENI ... |
Excellent | $73,500.00 |
|
Tegal 400 Asher Tegal model 400 strip/asher/descum. 300 Watt, 13.56 Mhz. ... |
Operational | $2,450.00 |
|
Noah Precision 2004 Chiller Model 2004, 208/20A/60Hz |
unk | $275.00 |
|
CleanTech 2000S CleanTech 2000S hand washer. We have several in ... |
good | $1,275.00 |