Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment and spare parts. We deal in equipment and spare  parts used in the fabrication and manufacturing of solar cells and semiconductors.

We specialize in plasma etch, clean, ash, strip equipment and ATE Equipment. New arrivals include: Drytek 384t, March PX-1000, M&W Dual Channel Chiller, ENI- OEM 650A, Plasmos SD-4000, a large supply of new Drytek/Lam Quad, 384T and ASIQ spare parts, and a large selection of Cell Phone Test Equipment. If we don't own it, we don't list it. We accept Mastercard, Visa, Paypal, and Discover Cards.

Manufacturer Model Condition Price
Dainippion Screen (DNS) WS-620C SRD
DNS WS-620 150 MM SRD. I think that ...
Unused/Unknown $4,000.00
Drytek Triode / 384T
Complete Drytek Triode 384T Metal Etcher. 150 MM, ...
used $9,700.00
Osaka TD 370/400 Controller TG 373M Turbo Pump
Osaka Model TD 370/400 Turbo Controller and two ...
used $1,200.00
HP Agilent Signal Generator 8657B
HP Agilent Model 8657B, S/N 3315003778 Synthesized Signal ...
used operational $900.00
PLASMOS SD-4000 (2)
We have two that we're selling as a ...
unk $9,750.00
Drytek RF Supply / 2000500
Drytek Model 2000500 1000 Watt 13.56 Mhz RF ...
operational $2,750.00
Lam Remote CRT
Part # 852-017750-001E, Classic software. Powers up and ...
Used $3,000.00
Gasonics Remote AC Box L-3510
Remote AC Box for Gasonics L-3510
Good $1,975.00
Lam Rainbow Pump Control Box
Pump control box for Lam Rainbow tool. billyliles@aol.com ...
Used $2,500.00
March PX-1000
OPERATIONAL. We checked it, both in the Manual and Auto ...
Good/Operational $29,500.00
Edwards Pump/Enclosure
Edwards pump enclosure for QDP/QMB series pumps.
appears good $900.00
MKS Pressure Contoller / 152E
Model 152E-PO Automatic Pressure Cntroller, S/N 36255-1-1c We ...
used operational $650.00
VAT PM5
VAT PM5 Adaptive Pressure Controller Fabr 3 641PM-16NN-0002/026, ...
Used/Good $475.00
ENI OEM 650A
Model OEM-6A-11491-52, S/N 5278, Rev A Water Cooled ...
Good $1,750.00
Drytek/Lam New Spares
Just arrived! A truck load of "NEW in the ...
NEW $0.00
Noise/Com MP 2500 Multi Path Fading Emulator
Noise/Com Multi Path Fading Emulator Model 2500 Powers ...
used / operational $3,500.00
Wavetek Model 3600 D
Wavetek Cellular Test System Model 3600D CDMA Test ...
used / operational $1,500.00
Drytek / Lam Gas Box
S/N 2791 ASIQ Chamber 1 Left Upper 6 ...
Used $1,500.00
M&W Dual Channel Cooling System
M&W Dual Channel Flowrite Recirculating Cooling System. Used ...
Looks Good $3,750.00
FTS Systems Chiller
Recirc cooling system.
unk $400.00
Drytek/Lam Automatch
Lam/Drytek ASIQ automatch part # 60194-1, several in ...
good $875.00
Holiday Rambler Augusta B+ Sport
2008 Augusta B + Sport motor Home. Fully ...
Excellent $46,500.00
Drytek/Lam ASIQ Transfer Load lock
Lam/ Drytek ASIQ 150MM Transfer Loadlock Chamber. The ...
used $2,500.00
Drytek / Lam ASIQ RF Match
We have several "NEW in the BOX" ASIQ ...
NEW $4,500.00
Lam ASIQ Etcher/Asher
S/N W-1102-700.021, 150 MM,  Removed from Fab as ...
Selling for parts $10,500.00
Lam Alliance 9500
Lam Alliance Model 9500. 150MM. It fits onto ...
Used $4,750.00
Lam A-4 Gas Box
Lam Gas box used on A-4 Alliance Plateform. ...
Used $6,500.00
HP Agilent 8901A Modulation Analyzer
OPT 4 S/n 2916A05294. billyliles@aol.com
Used / Operational $400.00
Agilent 6654A DC Power Supply
Agilent 0-60 Volt, 0-9 Amp DC Poer Supply
Used/operational $450.00
HP Agilent 6626A Quad DC Power Supply
HP Agilent model 6626A Quad Output DC Power ...
used / operational $1,100.00
HP Agilent 6612C DC Power supply
HP Agilent Model 6612C 0-20 VDC Power Supply ...
used operational $800.00
MKS 651C Pressure Controller
651CD281N Pressure Controller. We checked it out with ...
used/operational $975.00
Fluke 6011A Synthesized Signal Generator
Fluke 6011A Synthesized Signal Generator 1- Hz to ...
used / operational $375.00
LAM 4520
SOLD on 3/1/2010 S/N  24232. 200mm,CE Marked, Wafer ...
Excellent $99,000.00
Drytek 384T RF Match / 600768
384T Rf Matching Network, S/N MT1033.
Used $950.00
Drytek/Lam 384T RF Match
Rebuilt by Lam and still in the box!! ...
Rebuilt $4,700.00
Drytek/PMT 384T Gas Box
6 Gas Line Gas Cabinet for Drytek 384T, ...
Used $900.00
Lam 2K RF Generator
New in the box. Drytek/Lam 2k RF Supply. ...
NEW $4,500.00
Marconi 2955-900A Radio Comm Test Set
Marconi Type 52955-900A Radio Communication Test Set S/N ...
used operational $2,799.00
Marconi 2850S Digital Trans Analyzer
Marconi Digital Transmission Analyzer Model 2850S S/N 243306/019 ...
used operational $2,500.00
MKS 252C
MKS 252C 11058 Throttle Valve Controller S/N 93169103A ...
Used / Operational $275.00
Lam Research 2080 TCU
SOLD 11/13/09 Lam Research 2080 TCU, Dual Channel ...
Used $4,975.00
HP Agilent 141T/8554T/8552A Spectrum Analyzer
HP 141T / 8554L / 8552A Spectrum Analyzer ...
used operational $750.00