Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.

We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam ASIQ Metal Etcher/Asher cluster tool, and Lam 9500 Alliance chambers. 

Manufacturer Model Condition Price
CleanTech 2000S
CleanTech 2000S hand washer. We have several in ...
good $1,275.00
Noah Precision 2004 Chiller
Model 2004, 208/20A/60Hz
unk $275.00
Tegal 400 Asher
Tegal model 400 strip/asher/descum. 300 Watt, 13.56 Mhz. ...
Operational $2,450.00
LAM 4420
S/N 20166 and 20069, 200MM, Classic software, ENI ...
Excellent $73,500.00
LAM 4520
S/N  24232. 200mm,CE Marked, Wafer Clamping, Backside Helium, ...
Excellent $149,500.00
Lam A-4 Gas Box
Lam Gas box used on A-4 Alliance Plateform. ...
Used $6,500.00
LAM AC Remote Box
Remote box AC box for Lam Rainbow 4420 ...
appears good $2,450.00
ENI ACG-5 XL
ENI ACG-5 XL RF 13.56Mhz 500 Watt "air ...
Operational $1,450.00
Lam Alliance 9500
Lam Alliance Model 9500. 150MM. It fits onto ...
Used $4,750.00
Asyst APL-2200 SMIF Loader
Part # 9700-3520-02, Three in stock, 200MM Bolt ...
Excellent $2,850.00
Tegal Super 421 Asher/Etcher
Operational Dual channel Barrel asher/etcher. Temperature control, Two ...
Operational $4,750.00
Lam ASIQ Etcher/Asher
S/N W-1102-700.021, Removed from Fab as working tool. ...
Excellent $49,500.00
Lam/Drytek ASIQ Transfer Load lock
Lam/ Drytek ASIQ 150MM Transfer Loadlock Chamber.
used $2,500.00
Lam Automatch
ASIQ automatch part # 60194-1, several in stock.
good $1,875.00
Branson/IPC 2000T Barrel Asher/Etcher
Barrel Etcher/Asher 12" Quartz Chamber, 1000 Watt, 13.56MHz ...
Appears good $7,500.00
FTS Systems Chiller
Recirc cooling system.
unk $400.00
Lam Dual Channel RF Supply
Lam Dual Channel 13.56 MHZ RF Supply. Model ...
Used/Unknow $995.00
Zevatech ESEC CT-2000
S/N 80018. Pick and place.
appears good $15,000.00
Gaertner L-115B
Gaertner Ellipsometer. Computer needs repair.
used $1,500.00
Lam M/W Power Supply with Chamber
Lam Magnatron power supply, part # 853-080248-001 E-1, ...
Never used $5,775.00
Leybold OF-1000
Leybold Model OF-1000 oil recirc system. Three in ...
appears good $375.00
Technics PlasmaEtch 11
Technics PlasmaEtch 11 Anisotropic Etcher with 30 KHZ ...
Used/Operational $7,750.00
Norcimbus Power Purge lV
"Brand New" Norcimbus three bottle gas cabinet. Two ...
New $8,500.00
Edwards Pump/Enclosure
Edwards pump enclosure for QDP/QMB series pumps.
appears good $900.00
Edwards QDP-80
Edwards QDP-80 Dry Pump. 56 CFM, 208 VAC ...
Used/Unknow $4,000.00
Gasonics Remote AC Box L-3510
Remote AC Box for Gasonics L-3510
Good $975.00
Affinty RWA-007C-CE18CA
Water Cooled, 2 KW, 3 Gallon Minute @ ...
Used $675.00
PLASMOS SD-4000
 Complete parts tool. Cassette to Cassette automated Ellipsometer. ...
unk $2,850.00
OSAKA Vacuum TG 373/TD370/400
Osaka Vacuum Turbo Pump Model TG 373 with ...
Used $1,175.00
OSAKA TH-542
Turbo pump, s/n H520-1068, Pump was rebuilt but ...
Excellent $975.00
MicroBar TrackMate
S/N 93-05-1143. Remote Track Auto Fill System. Three ...
Used/Unknow $2,000.00
BEMAG Transformer
Step down transformer. Part # BC3030P480K20ESC3R, 30 KVA, ...
Good $400.00
Dainippion Screen (DNS) WS-620C SRD
DNS WS-620 150 MM SRD. I think that ...
Unused $12,000.00
Blue M WSP-109B
Dual Thermo Shock Oven, 75'C to 200'C. 208V/1Ph/60HZ. ...
Used $775.00