Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment, electronic test equipment, and spare parts. We deal in equipment and spare  parts used in the fabrication, testing, and manufacturing of solar cells and semiconductors.

We specialize in plasma etch, clean, ash, strip equipment and ATE Equipment. New arrivals include: Drytek 384t, March PX-1000, M&W Dual Channel Chiller, ENI- OEM 650A, ENI OEM 6B, Plasmos SD-4000, Tegal 960, a large supply of new Drytek/Lam Quad, 384T and ASIQ spare parts, and a large selection of Cell Phone Test Equipment. If we don't own it, we don't list it. We accept Mastercard, Visa, Paypal, and Discover Cards.

Manufacturer Model Condition Price
HP Agilent 141T/8554T/8552A Spectrum Analyzer
HP 141T / 8554L / 8552A Spectrum Analyzer ...
used operational $750.00
Lam Research 2080 TCU
SOLD 11/13/09 Lam Research 2080 TCU, Dual Channel ...
Used $4,975.00
MKS 252C
MKS 252C 11058 Throttle Valve Controller S/N 93169103A ...
Used / Operational $275.00
Marconi 2850S Digital Trans Analyzer
Marconi Digital Transmission Analyzer Model 2850S S/N 243306/019 ...
used operational $2,500.00
Marconi 2955-900A Radio Comm Test Set
Marconi Type 52955-900A Radio Communication Test Set S/N ...
used operational $2,799.00
Lam 2K RF Generator
New in the box. Drytek/Lam 2k RF Supply. ...
NEW $4,500.00
Drytek/PMT 384T Gas Box
6 Gas Line Gas Cabinet for Drytek 384T, ...
Used $900.00
Drytek/Lam 384T RF Match
Rebuilt by Lam and still in the box!! ...
Rebuilt $4,700.00
Drytek 384T RF Match / 600768
384T Rf Matching Network, S/N MT1033.
Used $950.00
LAM 4520
SOLD on 3/1/2010 S/N  24232. 200mm,CE Marked, Wafer ...
Excellent $99,000.00
Fluke 6011A Synthesized Signal Generator
Fluke 6011A Synthesized Signal Generator 1- Hz to ...
used / operational $375.00
MKS 651C Pressure Controller
651CD281N Pressure Controller. We checked it out with ...
used/operational $975.00
HP Agilent 6612C DC Power supply
HP Agilent Model 6612C 0-20 VDC Power Supply ...
used operational $800.00
HP Agilent 6626A Quad DC Power Supply
HP Agilent model 6626A Quad Output DC Power ...
used / operational $1,100.00
HP Agilent 8901A Modulation Analyzer
OPT 4 S/n 2916A05294. billyliles@aol.com
Used / Operational $400.00
Lam A-4 Gas Box
Lam Gas box used on A-4 Alliance Plateform. ...
Used $9,500.00
Lam Alliance 9500
Lam Alliance Model 9500. 150MM. It fits onto ...
Used $4,750.00
Lam ASIQ Etcher/Asher
S/N W-1102-700.021, 150 MM,  Removed from Fab as ...
Selling for parts $10,500.00
Drytek / Lam ASIQ RF Match
We have several "NEW in the BOX" ASIQ ...
NEW $4,500.00
Drytek/Lam ASIQ Transfer Load lock
Lam/ Drytek ASIQ 150MM Transfer Loadlock Chamber. The ...
used $2,500.00
Holiday Rambler Augusta B+ Sport
2008 Augusta B + Sport motor Home. Fully ...
Excellent $46,500.00
Drytek/Lam Automatch
Lam/Drytek ASIQ automatch part # 60194-1, several in ...
good $875.00
FTS Systems Chiller
Recirc cooling system.
unk $400.00
M&W Dual Channel Cooling System
M&W Dual Channel Flowrite Recirculating Cooling System. Used ...
Looks Good $3,750.00
Drytek / Lam Gas Box
S/N 2791 ASIQ Chamber 1 Left Upper 6 ...
Used $1,500.00
Wavetek Model 3600 D
Wavetek Cellular Test System Model 3600D CDMA Test ...
used / operational $1,500.00
Noise/Com MP 2500 Multi Path Fading Emulator
Noise/Com Multi Path Fading Emulator Model 2500 Powers ...
used / operational $3,500.00
Drytek/Lam New Spares
Just arrived! A truck load of "NEW in the ...
NEW $0.00
ENI OEM 650A
Model OEM-6A-11491-52, S/N 5278, Rev A Water Cooled ...
Good $1,750.00
VAT PM5
VAT PM5 Adaptive Pressure Controller Fabr 3 641PM-16NN-0002/026, ...
Used/Good $475.00
MKS Pressure Contoller / 152E
Model 152E-PO Automatic Pressure Cntroller, S/N 36255-1-1c We ...
used operational $650.00
Edwards Pump/Enclosure
Edwards pump enclosure for QDP/QMB series pumps.
appears good $900.00
March PX-1000
OPERATIONAL. We checked it, both in the Manual and Auto ...
Good/Operational $29,500.00
Lam Rainbow Pump Control Box
Pump control box for Lam Rainbow tool. billyliles@aol.com ...
Used $2,500.00
Gasonics Remote AC Box L-3510
Remote AC Box for Gasonics L-3510
Good $1,975.00
Lam Remote CRT
Part # 852-017750-001E, Classic software. Powers up and ...
Used $3,000.00
Drytek RF Supply / 2000500
Drytek Model 2000500 1000 Watt 13.56 Mhz RF ...
operational $2,750.00
PLASMOS SD-4000 (2)
We have two that we're selling as a ...
unk $9,750.00
Osaka TD 370/400 Controller TG 373M Turbo Pump
Osaka Model TD 370/400 Turbo Controller and two ...
used $1,200.00
Drytek Triode / 384T
Complete Drytek Triode 384T Metal Etcher. 150 MM, ...
used $12,000.00
Dainippion Screen (DNS) WS-620C SRD
DNS WS-620 150 MM SRD. I think that ...
Unused/Unknown $4,000.00