Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment and spare parts. We deal in equipment and spare  parts used in the fabrication and manufacturing of solar cells and semiconductors.

We specialize in plasma etch, clean, ash, strip equipment and ATE Equipment. New arrivals include: Drytek 384t, March PX-1000, M&W Dual Channel Chiller, ENI- OEM 650A, Plasmos SD-4000, a large supply of new Drytek/Lam Quad, 384T and ASIQ spare parts, and a large selection of Cell Phone Test Equipment. If we don't own it, we don't list it. We accept Mastercard, Visa, Paypal, and Discover Cards.

Single Image Single Image Single Image

Drytek / Lam Gas Box

Price:
$1,500.00

Condition:
Used

Description:

S/N 2791 ASIQ Chamber 1 Left Upper 6 gas box.

AERA FC-980C 80 SCCM BCL3, Unit 1260A 200 SCCM N2, Unit 1260A 200 SCCM N2, AERA FC980-C 10 SCCM CHF3, Unit 1260A 100 SCCM N2 AERA FC-980C 50 SCCM CL2.