Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.

We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam ASIQ Metal Etcher/Asher cluster tool, and Lam 9500 Alliance chambers. 

Single Image Single Image

ENI ACG-5 XL

Price:
$1,450.00

Condition:
Operational

Year:
1994

Description:

ENI ACG-5 XL RF 13.56Mhz 500 Watt "air cooled" RF Generator. S/N 5078, this generator was repaired and tested by ENI in April 2004 and never placed back into service. Repairs doc's are in the box. We verfied 500 watt operation into a dummy load.