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Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.
We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam ASIQ Metal Etcher/Asher cluster tool, and Lam 9500 Alliance chambers.
Price:
$49,500.00
Condition:
Excellent
Year:
1996
S/N W-1102-700.021, Removed from Fab as working tool. Three metal etch chambers and one resist strip. Three AE RF supplies, 1 Magtnetron power supply, 1 electrode motor chassis, 1 transport motor chassis, 3 MKS 600 series Pressure controllers, 1 MKS Type 651 Pressure controller, 3 Osaka Model TD370/400 power supplies.
We'll included a spare part machine and all of our ASIQ spare parts with the purchase of this tool.