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Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment and spare parts. We deal in equipment and spare parts used in the fabrication and manufacturing of solar cells and semiconductors.
We specialize in plasma etch, clean, ash, strip equipment and ATE Equipment. New arrivals include: Drytek 384t, March PX-1000, M&W Dual Channel Chiller, ENI- OEM 650A, Plasmos SD-4000, a large supply of new Drytek/Lam Quad, 384T and ASIQ spare parts, and a large selection of Cell Phone Test Equipment. If we don't own it, we don't list it. We accept Mastercard, Visa, Paypal, and Discover Cards.
Price:
$10,500.00
Condition:
Selling for parts
Year:
1996
S/N W-1102-700.021, 150 MM, Removed from Fab as working tool, but we've started parting it out. Original configuration was three metal etch chambers and one resist strip. Three AE 1250 watt RF supplies, 1 Magtnetron power supply, 1 electrode motor chassis, 1 transport motor chassis, 4 MKS Type 651 Pressure controllers, 3 Osaka turbo pumps with Model TD370/400 power supplies. Manuals included.