Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.

We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam ASIQ Metal Etcher/Asher cluster tool, and Lam 9500 Alliance chambers. 

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Tegal Super 421 Asher/Etcher

Price:
$4,750.00

Condition:
Operational

Description:

Operational Dual channel Barrel asher/etcher. Temperature control, Two gas inputs, ENI ACG-5XL RF Generator, 13.56Mhz 500 watts. Upgrade with Raines/Theis auto tune and baratron. Available for inspection. Two in stock.