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Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.
We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam ASIQ Metal Etcher/Asher cluster tool, and Lam 9500 Alliance chambers.
Price:
$73,500.00
Condition:
Excellent
Year:
1998
S/N 20166 and 20069, 200MM, Classic software, ENI 650 Watt RF Cart, Orbital Gas Box with Tylan 2900 MFC's, 8 Gas lines,Clampless, Hine 38A Indexers, upgraded wafer edge sensor rev.E, Loadlock wafer sensors, 405/520nm end point box, 2080 Dual Channel Chiller, Cables. Pumps and process kits are not included. Tool is powered up and ready for inspection. Rebuild and installation are available through a 3rd party for an extra charge.