Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.

We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam ASIQ Metal Etcher/Asher cluster tool, and Lam 9500 Alliance chambers. 

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LAM 4520

Price:
$149,500.00

Condition:
Excellent

Year:
1998

Description:

S/N  24232. 200mm,CE Marked, Wafer Clamping, Backside Helium, Endpoint Detection, Ergonomic Cassette load/unload, Hine 38A Indexers, Upgraded wafer edge sensor, Orbital welded 8 process gas box with Tylan 2900 MFC's, CF4-200 sccm, CF4- 50 sccm, CHF3- 200 sccm, N2- 100 sccm, AR-500 sccm, N2-100 sccm, AR-500 sccm, CHF3-200 sccm. Unit 1300 N2-50 sccm for backside cooling,  Remote RF cart with AE PDW 2200,  2080 dual channel chiller. Classic software. Pumps and process kit are not included. This tool is in excellent condition, powered up, and ready for inspection. Rebuild and installation is avaliable through a third party for an extra charge.