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Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.
We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam ASIQ Metal Etcher/Asher cluster tool, and Lam 9500 Alliance chambers.
Price:
$7,500.00
Condition:
Appears good
Year:
1987
Barrel Etcher/Asher
12" Quartz Chamber, 1000 Watt, 13.56MHz RF Generator. Three gas inputs, N2, 02, CF4. N2 purge. S/N F-253-1
Includes:
Model DPS 2300 EOP Detector
RF Generator Model PM-112
Temperature Cont. Model PM- 921C
All quartz has been removed and is boxed.